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(1 - 5 of 5)
- Title
- UV-LIGA COMPATIBLE ELECTROFORMED NANO-STRUCTURED MATERIALS FOR MICRO MECHANICAL SYSTEMS.
- Creator
-
LI, BO, Chen, Quanfang, University of Central Florida
- Abstract / Description
-
UV-LIGA is a microfabrication process realzed by material deposition through microfabricated molds. UV photolithography is conducted to pattern precise thick micro molds using UV light sensitive materials, mostly SU-8, and electroforming is performed to fabricate micro metallic structures defined by the micro molds. Therefore, UV-LIGA is a bottom-up in situ material-addition process. UV-LIGA has received broad attention recently than LIGA a micro molding fabrication process using X-ray to...
Show moreUV-LIGA is a microfabrication process realzed by material deposition through microfabricated molds. UV photolithography is conducted to pattern precise thick micro molds using UV light sensitive materials, mostly SU-8, and electroforming is performed to fabricate micro metallic structures defined by the micro molds. Therefore, UV-LIGA is a bottom-up in situ material-addition process. UV-LIGA has received broad attention recently than LIGA – a micro molding fabrication process using X-ray to pattern the micro molds. LIGA is an expansive and is limited in access. In comparing to LIGA, the UV-LIGA is a cost effective process, and is widely accessible and safe. Therefore, it has been extensively used for the fabrication of metallic micro-electro-mechanical-systems (MEMS). The motivation of this research was to study micro mechanical systems fabricated with nano-structured metallic materials via UV-LIGA process. Various micro mechanical systems with high-aspect-ratio and thick metallic structures have been developed and are presented in this desertation. A novel micro mechanical valve has been developed with nano-structured nickel realized with UV-LIGA fabrication technique. Robust compact valves are crucial for space applications where payload and rubstaness are critically concerned. Two types of large flow rate robust passive micro check valve arrays have been designed, fabricated and tested for robust hydraulic actuators. The first such micro valve developed employs nanostructured nickel as the valve flap and single-crystal silicon as the substrates to house inlet and outlet channels. The Nano-structured nickel valve flap was fabricated using the UV-LIGA process developed and the microchannels were fabricated by deep reactive etching (DRIE) method. The valves were designed to operate under a high pressure (>10MPa), able to operate at high frequencies (>10kHz) in cooperating with the PZT actuator to produce large flow rates (>10 cc/s). The fabricated microvalves weigh 0.2 gram, after packing with a novel designated valve stopper. The tested results showed that the micro valve was able to operate at up to 14kHz. This is a great difference in comparison to traditional mechanical valves whose operations are limited to 500 Hz or less. The advantages of micro machined valves attribute to the scaling laws. The second type of micro mechanical valves developed is a in situ assembled solid metallic (nickel) valves. Both the valve substrates for inlet and outlet channels and the valve flap, as well as the valve stopper were made by nickel through a UV-LIGA fabrication process developed. Continuous multiple micro molds fabrication and molding processes were performed. Final micro mechanical valves were received after removing the micro molds used to define the strutures. There is no any additional machining process, such as cutting or packaging. The alignment for laminated fabrication was realized under microscope, therefore it is a highly precise in situ fabrication process. Testing results show the valve has a forward flow rate of19 cc/s under a pressure difference of 90 psi. The backward flow rate of 0.023 cc/s, which is negligible (0.13%). Nano-structured nickel has also been used to develop laminated (sandwiched) micro cryogenic heater exchanger with the UV-LIGA process. Even though nickel is apparently not a good thermal conductor at room temperature, it is a good conductor at cryogentic temerpature since its thermal conductivity increases to 1250 W/k·m at 77K. Micro patterned SU-8 molds and electroformed nickel have been developed to realize the sandwiched heat exchanger. The SU-8 mold (200mm x 200mm x50mm) array was successfully removed after completing the nickel electroforming. The second layer of patterned SU-8 layer (200mm x 200mm x50mm, as a thermal insulating layer) was patterned and aligned on the top of the electroformed nickel structure to form the laminated (sandwiched) micro heat exchanger. The fabricated sandwiched structure can withstand cryogenic temperature (77K) without any damages (cracks or delaminations). A study on nanocomposite for micro mechanical systems using UV-LIGA compatible electroforming process has been performed. Single-walled carbon nanotubes (SWNTs) have been proven excellent mechanical properties and thermal conductive properties, such as high strength and elastic modulus, negative coefficient of thermal expansion (CTE) and a high thermal conductivity. These properties make SWNT an excellent reinforcement in nanocomposite for various applications. However, there has been a challenge of utilizing SWNTs for engineering applications due to difficulties in quality control and handling – too small (1-2nm in diameter). A novel copper/SWNT nanocomposite has been developed during this dissertational research. The goal of this research was to develop a heat spreader for high power electronics (HPE). Semiconductors for HPE, such as AlGaN/GaN high electron mobility transistors grown on SiC dies have a typical CTE about 4~6x10-6/k while most metallic heat spreaders such as copper have a CTE of more than 10x10-6/k. The SWNTs were successfully dispersed in the copper matrix to form the SWNT/Cu nano composite. The tested composite density is about 7.54 g/cm3, which indicating the SWNT volumetric fraction of 18%. SEM pictures show copper univformly coated on SWNT (worm-shaped structure). The measured CTE of the nanocomposite is 4.7 x 10-6/°C, perfectly matching that of SiC die (3.8 x 10-6/°C). The thermal conductivity derived by Wiedemann-Franz law after measuring composit's electrical conductivity, is 588 W/m-K, which is 40% better than that of pure copper. These properties are extremely important for the heat spreader/exchanger to remove the heat from HPE devices (SiC dies). Meanwhile, the matched CTE will reduce the resulted stress in the interface to prevent delaminations. Therefore, the naocomposite developed will be an excellent replacement material for the CuMo currently used in high power radar, and other HPE devices under developing. The mechanical performance and reliability of micro mechanical devices are critical for their application. In order to validate the design & simulation results, a direct (tensile) test method was developed to test the mechanical properties of the materials involved in this research, including nickel and SU-8. Micro machined specimens were fabricated and tested on a MTS Tytron Micro Force Tester with specially designed gripers. The tested fracture strength of nanostructured nickel is 900±70 MPa and of 50MPa for SU-8, resepctively which are much higher than published values.
Show less - Date Issued
- 2005
- Identifier
- CFE0000478, ucf:46372
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0000478
- Title
- EXPERIMENTAL AND CFD INVESTIGATIONS OF LIFTED TRIBRACHIAL FLAMES.
- Creator
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li, zhiliang, Chen, Ruey-Hung, University of Central Florida
- Abstract / Description
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Experimental measurements of the lift-off velocity and lift-off height, and numerical simulations were conducted on the liftoff and stabilization phenomena of laminar jet diffusion flames of inert-diluted C3H8 and CH4 fuels. Both non-reacting and reacting jets were investigated, including effects of multi-component diffusivities and heat release (buoyancy and gas expansion). The role of Schmidt number for non-reacting jets was investigated, with no conclusive Schmidt number criterion for...
Show moreExperimental measurements of the lift-off velocity and lift-off height, and numerical simulations were conducted on the liftoff and stabilization phenomena of laminar jet diffusion flames of inert-diluted C3H8 and CH4 fuels. Both non-reacting and reacting jets were investigated, including effects of multi-component diffusivities and heat release (buoyancy and gas expansion). The role of Schmidt number for non-reacting jets was investigated, with no conclusive Schmidt number criterion for liftoff previously known in similarity solutions. The cold-flow simulation for He-diluted CH4 fuel does not predict flame liftoff; however, adding heat release reaction leads to the prediction of liftoff, which is consistent with experimental observations. Including reaction was also found to improve liftoff height prediction for C3H8 flames, with the flame base location differing from that in the similarity solution - the intersection of the stoichiometric and iso-velocity contours is not necessary for flame stabilization (and thus lift-off). Possible mechanisms other than that proposed for similarity solution may better help to explain the stabilization and liftoff phenomena. The stretch rate at a wide range of isotherms near the base of the lifted tribrachial flame were also quantitatively plotted and analyzed.
Show less - Date Issued
- 2010
- Identifier
- CFE0003135, ucf:48621
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0003135
- Title
- Generation and Characterization of Isolated Attosecond Pulse in the Soft X-ray Regime.
- Creator
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Li, Jie, Chang, Zenghu, Delfyett, Peter, Vanstryland, Eric, Chen, Bo, University of Central Florida
- Abstract / Description
-
The observation of any atomic and molecular dynamics requires a probe that has a timescale comparable to the dynamics itself. Ever since the invention of laser, the temporal duration of the laser pulse has been incrementally reduced from several nanoseconds to just attoseconds. Picosecond and femtosecond laser pulses have been widely used to study molecular rotation and vibration. In 2001, the first single isolated attosecond pulse (1 attosecond = 10^-18 seconds.) was demonstrated. Since this...
Show moreThe observation of any atomic and molecular dynamics requires a probe that has a timescale comparable to the dynamics itself. Ever since the invention of laser, the temporal duration of the laser pulse has been incrementally reduced from several nanoseconds to just attoseconds. Picosecond and femtosecond laser pulses have been widely used to study molecular rotation and vibration. In 2001, the first single isolated attosecond pulse (1 attosecond = 10^-18 seconds.) was demonstrated. Since this breakthrough, (")attoscience(") has become a hot topic in ultrafast physics. Attosecond pulses typically have span between EUV to X-ray photon energies and sub-femtosecond pulse duration. It becomes an ideal tool for experimentalists to study ultrafast electron dynamics in atoms, molecules and condensed matter. The conventional scheme for generating attosecond pulses is focusing an intense femtosecond laser pulse into inert gases. The bound electrons are ionized into continuum through tunneling ionization under the strong electrical field. After ionization, the free electron will be accelerated by the laser field away from the parent ion and then recombined with its parent ion and releases its kinetic energy as a photon burst that lasts for a few hundred attoseconds. According to the classical (")three-step model("), high order harmonic will have a higher cutoff photon energy when driven by a longer wavelength laser field. Compared to Ti:sapphire lasers center at a wavelength of 800 nm, an optical parametric amplifier could offer a broad bandwidth at infrared range, which could support few cycle pulses for driving high harmonic generation in the X-ray spectrum range. In this work, an optical parametric chirped-pulse amplification system was developed to deliver CEP-stable 3-mJ, 12-fs pulses centered at 1.7 micron. We implement a chirped-pump technique to phase match the board parametric amplification bandwidth with high conversion efficiency. Using such a laser source, isolated attosecond pulses with photon exceeding 300 eV are achieved by applying the polarization gating technique at 1.7 micron. The intrinsic positive chirp of the attosecond pulses is measured by the attosecond streak camera and retrieved with our PROOF technique. Sn metal filters with negative dispersion were chosen to compensate the intrinsic attochirp. As a result, isolated 53-attosecond soft x-ray pulses are achieved. Such water window attosecond source will be a powerful tool for studying charge distribution/migration in bio-molecules and will bring opportunities to study high field physics or attochemistry.
Show less - Date Issued
- 2018
- Identifier
- CFE0007040, ucf:52007
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0007040
- Title
- Mode Evolution in Fiber Based Devices for Optical Communication Systems.
- Creator
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Huang, Bin, Li, Guifang, Amezcua Correa, Rodrigo, Abouraddy, Ayman, Chen, Haoshuo, University of Central Florida
- Abstract / Description
-
Space division multiplexing (SDM) is the most promising way of increasing the capacity of a single fiber. To enable the few mode fiber (FMF) or multi-mode fiber (MMF) transmission system, several major challenges have to be overcome. One is the urgent need of ideal mode multiplexer, the second is the perfect amplification for all spatial modes, another one is the modal delay spread (MDS) due to group velocity difference of spatial modes. The main subject of this dissertation is to model,...
Show moreSpace division multiplexing (SDM) is the most promising way of increasing the capacity of a single fiber. To enable the few mode fiber (FMF) or multi-mode fiber (MMF) transmission system, several major challenges have to be overcome. One is the urgent need of ideal mode multiplexer, the second is the perfect amplification for all spatial modes, another one is the modal delay spread (MDS) due to group velocity difference of spatial modes. The main subject of this dissertation is to model, fabricate and characterize the mode multiplexer for FMF transmission. First, we designed a novel resonant mode coupler (structured directional coupler pair). After that, we studied the adiabatic mode multiplexer (photonic lantern). 6-mode photonic lantern using graded-index (GI) MMFs is proposed and demonstrated, which alleviates the adiabatic require-ment and improves mode selectivity. Then, 10-mode photonic lantern is demonstrated using novel double cladding micro-structured drilling-hole preform, which alleviates the adiabatic requirement and demonstrate a feasible way to scale up the lantern modes. Also, multi-mode photonic lantern is studied for high order input modes. In addition, for the perfect amplification of the modes, cladding pump method is demonstrated. The mode selective lantern designed and fabricated can be used for the characterization of few mode amplifier with swept wavelength interferometer (SWI). Also, we demonstrated the application of the use of the few mode amplifier for the turbulence-resisted preamplified receiver. Besides, for the reduction of MDS, the long period grating for introducing strong mode mixing is demonstrated.
Show less - Date Issued
- 2017
- Identifier
- CFE0006884, ucf:51720
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0006884
- Title
- A Novel Nonlinear Mason Model and Nonlinear Distortion Characterization for Surface Acoustic Wave Duplexers.
- Creator
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Chen, Li, Wahid, Parveen, Malocha, Donald, Richie, Samuel, Briot, Jean-Bernard, University of Central Florida
- Abstract / Description
-
Surface acoustic wave (SAW) technology has been in use for well over one century. In the last few decades, due to its low cost and high performance, this technology has been widely adopted in modern wireless communication systems, to build filtering devices at radio frequency (RF). SAW filters and duplexers can be virtually found inside every mobile handset. SAW devices are traditionally recognized as passive devices with high linear signal processing behavior. However, recent deployments of...
Show moreSurface acoustic wave (SAW) technology has been in use for well over one century. In the last few decades, due to its low cost and high performance, this technology has been widely adopted in modern wireless communication systems, to build filtering devices at radio frequency (RF). SAW filters and duplexers can be virtually found inside every mobile handset. SAW devices are traditionally recognized as passive devices with high linear signal processing behavior. However, recent deployments of third generation (3G) and fourth generation (4G) mobile networks require the handsets to handle an increasing number of frequency bands with more complex modulation /demodulation schemes and higher data rate for more subscribers. These requirements directly demand more stringent linearity specifications on the front end devices, including the SAW duplexers. In the past, SAW duplexer design was based on empirically obtained design rules to meet the linearity specifications. Lack of predictability and an understanding of the root cause of the nonlinearity have limited the potential applications of SAW duplexers. Therefore, research on the nonlinearity characterization and an accurate modeling of SAW nonlinearity for mobile device applications are very much needed.The Ph.D. work presented here primarily focuses on developing a general nonlinear model for SAW resonators/duplexers. Their nonlinear characteristics were investigated by measuring the harmonic and intermodulation distortions of resonators. A nonlinear Mason model is developed and the characterization results are integrated into SAW duplexer design flows to help to simulate the nonlinear effects accurately and improve the linearity performance of the products.In this dissertation, first, a novel nonlinear Mason equivalent circuit model including a third order nonlinear coefficient in the wave propagation is presented. Next, the nonlinear distortions of SAW resonators are analyzed by measuring large-signal harmonic and intermodulation spurious emission on resonators using a wafer probe station. The influence of the setups on the measurement reliability and reproducibility is discussed. Further, the nonlinear Mason model is validated by comparing its simulation results with harmonic and intermodulation measurements on SAW resonators and a WCDMA Band 5 duplexer. The Mason model developed and presented here is the first and only nonlinear physical model for SAW devices based on the equivalent circuit approach. By using this new model, good simulation measurement agreements are obtained on both harmonic and intermodulation distortions for SAW resonators and duplexers. These outcomes demonstrate the validity of the research on both the characterization and modeling of SAW devices. The result obtained confirms that the assumption of the representation of the 3rd order nonlinearity in the propagation by a single coefficient is valid.
Show less - Date Issued
- 2013
- Identifier
- CFE0004967, ucf:49565
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0004967
