Current Search:   Laser metallization (x)

View All Items

  • CSV Spreadsheet
(1 - 3 of 3)
LASER METALLIZATION AND DOPING FOR SILICON CARBIDE DIODE FABRICATION AND ENDOTAXY
Title
LASER METALLIZATION AND DOPING FOR SILICON CARBIDE DIODE FABRICATION AND ENDOTAXY.
Creator
Tian, Zhaoxu, Kar, Aravinda, University of Central Florida
Abstract / Description
Silicon carbide is a promising semiconductor material for high voltage, high frequency and high temperature devices due to its wide bandgap, high breakdown electric field strength, highly saturated drift velocity of electrons and outstanding thermal conductivity. With the aim of overcoming some challenges in metallization and doping during the fabrication of silicon carbide devices, a novel laser-based process is provided to direct metallize the surface of silicon carbide without metal...
Show moreSilicon carbide is a promising semiconductor material for high voltage, high frequency and high temperature devices due to its wide bandgap, high breakdown electric field strength, highly saturated drift velocity of electrons and outstanding thermal conductivity. With the aim of overcoming some challenges in metallization and doping during the fabrication of silicon carbide devices, a novel laser-based process is provided to direct metallize the surface of silicon carbide without metal deposition and dope in silicon carbide without high temperature annealing, as an alternative to the conventional ion implantation, and find applications of this laser direct write metallization and doping technique on the fabrication of diodes, endotaxial layer and embedded optical structures on silicon carbide wafers. Mathematical models have been presented for the temperature distributions in the wafer during laser irradiation to optimize laser process parameters and understand the doping and metallization mechanisms in laser irradiation process. Laser irradiation of silicon carbide in a dopant-containing ambient allows to simultaneously heating the silicon carbide surface without melting and incorporating dopant atoms into the silicon carbide lattice. The process that dopant atoms diffuse into the bulk silicon carbide by laser-induced solid phase diffusion (LISPD) can be explained by considering the laser enhanced substitutional and interstitial diffusion mechanisms. Nitrogen and Trimethyaluminum (TMA) are used as dopants to produce n-type and p-type doped silicon carbide, respectively. Two laser doping methods, i.e., internal heating doping and surface heating doping are presented in this dissertation. Deep (800 nm doped junction for internal heating doping) and shallow (200 nm and 450 nm doped junction for surface heating doping) can be fabricated by different doping methods. Two distinct diffusion regions, near-surface and far-surface regions, were identified in the dopant concentration profiles, indicating different diffusion mechanisms in these two regions. The effective diffusion coefficients of nitrogen and aluminum were determined for both regions by fitting the diffusion equation to the measured concentration profiles. The calculated diffusivities are at least 6 orders of magnitude higher than the typical values for nitrogen and aluminum, which indicate that laser doping process enhances the diffusion of dopants in silicon carbide significantly. No amorphization was observed in laser-doped samples eliminating the need for high temperature annealing. Laser direct metallization can be realized on the surface of silicon carbide by generating metal-like conductive phases due to the decomposition of silicon carbide. The ohmic property of the laser direct metallized electrodes can be dramatically improved by fabricating such electrodes on laser heavily doped SiC substrate. This laser-induced solid phase diffusion technique has been utilized to fabricate endolayers in n-type 6H-SiC substrates by carbon incorporation. X-ray energy dispersive spectroscopic analysis shows that the thickness of endolayer is about 100 nm. High resolution transmission electron microscopic images indicate that the laser endotaxy process maintains the crystalline integrity of the substrate without any amorphization. Rutherford backscattering studies also show no amorphization and evident lattice disorder occur during this laser solid phase diffusion process. The resistivity of the endolayer formed in a 1.55 omega•cm silicon carbide wafer segment was found to be 1.1E5 omega•cm which is sufficient for device fabrication and isolation. Annealing at 1000 oC for 10 min to remove hydrogen resulted in a resistivity of 9.4E4 omega•cm. Prototype silicon carbide PIN diodes have been fabricated by doping the endolayer and parent silicon carbide epilayer with aluminum using this laser-induced solid phase diffusion technique to create p-regions on the top surfaces of the substrates. Laser direct metallized contacts were also fabricated on selected PIN diodes to show the effectiveness of these contacts. The results show that the PIN diode fabricated on a 30 nm thick endolayer can block 18 V, and the breakdown voltages and the forward voltages drop at 100 A/cm2 of the diodes fabricated on 4H-SiC with homoepilayer are 420 ~ 500 V and 12.5 ~ 20 V, respectively. The laser direct metallization and doping technique can also be used to synthesize embedded optical structures, which can increase 40% reflectivity compared to the parent wafer, showing potential for the creation of optical, electro-optical, opto-electrical, sensor devices and other integrated structures that are stable in high temperature, high-pressure, corrosive environments and deep space applications.
Show less
Date Issued
2006
Identifier
CFE0001061, ucf:46803
Format
Document (PDF)
PURL
http://purl.flvc.org/ucf/fd/CFE0001061
Microstructure and Chemistry Evaluation of Direct Metal Laser Sintered 15-5 PH Stainless Steel
Title
Microstructure and Chemistry Evaluation of Direct Metal Laser Sintered 15-5 PH Stainless Steel.
Creator
Coffy, Kevin, Sohn, Yongho, Coffey, Kevin, Richardson, Martin, University of Central Florida
Abstract / Description
15-5PH stainless steel is an important alloy in the aerospace, chemical, and nuclear industries for its high strength and corrosion resistance at high temperature. Thus, this material is a good candidate for processing development in the direct metal laser sintering (DMLS) branch of additive manufacturing. The chemistry and microstructure of this alloy processed via DMLS was compared to its conventionally cast counterpart through various heat treatments as part of a characterization effort....
Show more15-5PH stainless steel is an important alloy in the aerospace, chemical, and nuclear industries for its high strength and corrosion resistance at high temperature. Thus, this material is a good candidate for processing development in the direct metal laser sintering (DMLS) branch of additive manufacturing. The chemistry and microstructure of this alloy processed via DMLS was compared to its conventionally cast counterpart through various heat treatments as part of a characterization effort. The investigation utilized optical microscopy, scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-Ray diffractometry (XRD), energy dispersive X-Ray spectroscopy (EDS) and glow discharge atomic emission spectrometry (GDS) techniques. DMLS processed samples contained a layered microstructure in which the prior austenite grain sizes were relatively smaller than the cast and annealed prior austenite grain size. The largest of the quantifiable DMLS prior austenite grains had an ASTM grain size of approximately 11.5-12 (6.7?m to 5.6?m, respectively) and the cast and annealed prior austenite grain size was approximately 7-7.5 (31.8?m to 26.7?m, respectively), giving insight to the elevated mechanical properties of the DMLS processed alloy. During investigation, significant amounts of retained austenite phase were found in the DMLS processed samples and quantified by XRD analysis. Causes of this phase included high nitrogen content, absorbed during nitrogen gas atomization of the DMLS metal powder and from the DMLS build chamber nitrogen atmosphere. Nitrogen content was quantified by GDS for three samples. DMLS powder produced by nitrogen gas atomization had a nitrogen content of 0.11 wt%. A DMLS processed sample contained 0.08 wt% nitrogen, and a conventionally cast and annealed sample contained only 0.019 wt% nitrogen. In iron based alloys, nitrogen is a significant austenite promoter and reduced the martensite start and finish temperatures, rendering the standard heat treatments for the alloy ineffective in producing full transformation to martensite. Process improvements are proposed along with suggested future research.
Show less
Date Issued
2014
Identifier
CFE0005317, ucf:50507
Format
Document (PDF)
PURL
http://purl.flvc.org/ucf/fd/CFE0005317
Characterization of Anisotropic Mechanical Performance of As-Built Additively Manufactured Metals
Title
Characterization of Anisotropic Mechanical Performance of As-Built Additively Manufactured Metals.
Creator
Siddiqui, Sanna, Gordon, Ali, Raghavan, Seetha, Bai, Yuanli, Sohn, Yongho, University of Central Florida
Abstract / Description
Additive manufacturing (AM) technologies use a 3D Computer Aided Design (CAD) model to develop a component through a deposition and fusion layer process, allowing for rapid design and geometric flexibility of metal components, for use in the aerospace, energy and biomedical industries. Challenges exist with additive manufacturing that limits its replacement of conventional manufacturing techniques, most especially a comprehensive understanding of the anisotropic behavior of these materials...
Show moreAdditive manufacturing (AM) technologies use a 3D Computer Aided Design (CAD) model to develop a component through a deposition and fusion layer process, allowing for rapid design and geometric flexibility of metal components, for use in the aerospace, energy and biomedical industries. Challenges exist with additive manufacturing that limits its replacement of conventional manufacturing techniques, most especially a comprehensive understanding of the anisotropic behavior of these materials and how it is reflected in observed tensile, torsional and fatigue mechanical responses. As such, there is a need to understand how the build orientation of as-built additively manufactured metals, affects mechanical performance (e.g. monotonic and cyclic behavior, cyclically hardening/softening behavior, plasticity effects on fatigue life etc.); and to use constitutive modeling to both support experimental findings, and provide approximations of expected behavior (e.g. failure surfaces, monotonic and cyclic response, correlations between tensile and fatigue properties), for orientations and experiments not tested, due to the expensive cost associated with AM. A comprehensive framework has been developed to characterize the anisotropic behavior of as-built additively manufactured metals (i.e. Stainless Steel GP1 (SS GP1), similar in chemical composition to Stainless Steel 17-4PH), through a series of mechanical testing, microscopic evaluation and constitutive modeling, which were used to identify a reduced specimen size for characterizing these materials. An analysis of the torsional response of additively manufactured Inconel 718 has been performed to assess the impact of build orientation and as-built conditions on the shearing behavior of this material. Experimental results from DMLS SS GP1 and AM Inconel 718 from literature were used to constitutively model the material responses of these additively manufactured metals. Overall, this framework has been designed to serve as standard, from which build orientation selection can be used to meet specific desired industry requirements.
Show less
Date Issued
2018
Identifier
CFE0007097, ucf:52883
Format
Document (PDF)
PURL
http://purl.flvc.org/ucf/fd/CFE0007097