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A NEW HYBRID DIFFRACTIVE PHOTO-MASK TECHNOLOGY

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Date Issued:
2005
Abstract/Description:
In the field of photolithography for micro-chip manufacturing, the photo-mask is used to print desired patterns on a proper photo-resist on wafer. The most common type of photo-mask is binary amplitude mask made an opaque layer of chrome. The principle and potential application of hybrid photo-mask with diffractive phase element and binary amplitude is presented in this dissertation paper from both numerical modeling and experimental research. The first important application is the characterization of aberration in the stepper system using hybrid diffractive photo-mask. By utilizing multiple diffractive illumination conditions, it is possible to characterize Zernike wave front aberration coefficients up to any desired order. And, the second application is the use of binary phase grating mask for analog micro-optics fabrication. This approach of using binary phase grating mask for fabricating analog micro-optics turned out to be a very effective alternative for gray-scale mask technology. Since this is a pure phase only mask, it doesn't cause any scattered noise light like half-tone mask and it results in smooth desired resist profile. The benefits and limitations of hybrid diffractive photo-mask approach for both applications are discussed.
Title: A NEW HYBRID DIFFRACTIVE PHOTO-MASK TECHNOLOGY.
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Name(s): Sung, Jin Won, Author
Johnson, Eric, Committee Chair
University of Central Florida, Degree Grantor
Type of Resource: text
Date Issued: 2005
Publisher: University of Central Florida
Language(s): English
Abstract/Description: In the field of photolithography for micro-chip manufacturing, the photo-mask is used to print desired patterns on a proper photo-resist on wafer. The most common type of photo-mask is binary amplitude mask made an opaque layer of chrome. The principle and potential application of hybrid photo-mask with diffractive phase element and binary amplitude is presented in this dissertation paper from both numerical modeling and experimental research. The first important application is the characterization of aberration in the stepper system using hybrid diffractive photo-mask. By utilizing multiple diffractive illumination conditions, it is possible to characterize Zernike wave front aberration coefficients up to any desired order. And, the second application is the use of binary phase grating mask for analog micro-optics fabrication. This approach of using binary phase grating mask for fabricating analog micro-optics turned out to be a very effective alternative for gray-scale mask technology. Since this is a pure phase only mask, it doesn't cause any scattered noise light like half-tone mask and it results in smooth desired resist profile. The benefits and limitations of hybrid diffractive photo-mask approach for both applications are discussed.
Identifier: CFE0000350 (IID), ucf:46296 (fedora)
Note(s): 2005-05-01
Ph.D.
Optics and Photonics, Other
Doctorate
This record was generated from author submitted information.
Subject(s): Photolithography
hybrid photomask
phase grating mask
photoresist
analog micro-optics
Persistent Link to This Record: http://purl.flvc.org/ucf/fd/CFE0000350
Restrictions on Access: public
Host Institution: UCF

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