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Performance optimization of lateral-mode thin-film piezoelectric-on-substrate resonant systems

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Date Issued:
2015
Abstract/Description:
The main focus of this dissertation is to characterize and improve the performance of thin-film piezoelectric-on-substrate (TPoS) lateral-mode resonators and filters. TPoS is a class of piezoelectric MEMS devices which benefits from the high coupling coefficient of the piezoelectric transduction mechanism while taking advantage of superior acoustic properties of a substrate. The use of lateral-mode TPoS designs allows for fabrication of dispersed-frequency filters on a single substrate, thus significantly reducing the size and manufacturing cost of devices. TPoS filters also offer a lower temperature coefficient of frequency, and better power handling capability compared to rival technologies all in a very small footprint.Design and fabrication process of the TPoS devices is discussed. Both silicon and diamond substrates are utilized for fabrication of TPoS devices and results are compared. Specifically, the superior acoustic properties of nanocrystalline diamond in scaling the frequency and energy density of the resonators is highlighted in comparison with silicon. The performance of TPoS devices in a variety of applications is reported. These applications include lateral-mode TPoS filters with record low IL values (as low as 2dB) and fractional bandwidth up to 1%, impedance transformers, very low phase noise oscillators, and passive wireless temperature sensors.
Title: Performance optimization of lateral-mode thin-film piezoelectric-on-substrate resonant systems.
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Name(s): Fatemi, Hedy, Author
Abdolvand, Reza, Committee Chair
Sundaram, Kalpathy, Committee Member
Malocha, Donald, Committee Member
Gong, Xun, Committee Member
Cho, Hyoung Jin, Committee Member
University of Central Florida, Degree Grantor
Type of Resource: text
Date Issued: 2015
Publisher: University of Central Florida
Language(s): English
Abstract/Description: The main focus of this dissertation is to characterize and improve the performance of thin-film piezoelectric-on-substrate (TPoS) lateral-mode resonators and filters. TPoS is a class of piezoelectric MEMS devices which benefits from the high coupling coefficient of the piezoelectric transduction mechanism while taking advantage of superior acoustic properties of a substrate. The use of lateral-mode TPoS designs allows for fabrication of dispersed-frequency filters on a single substrate, thus significantly reducing the size and manufacturing cost of devices. TPoS filters also offer a lower temperature coefficient of frequency, and better power handling capability compared to rival technologies all in a very small footprint.Design and fabrication process of the TPoS devices is discussed. Both silicon and diamond substrates are utilized for fabrication of TPoS devices and results are compared. Specifically, the superior acoustic properties of nanocrystalline diamond in scaling the frequency and energy density of the resonators is highlighted in comparison with silicon. The performance of TPoS devices in a variety of applications is reported. These applications include lateral-mode TPoS filters with record low IL values (as low as 2dB) and fractional bandwidth up to 1%, impedance transformers, very low phase noise oscillators, and passive wireless temperature sensors.
Identifier: CFE0005945 (IID), ucf:50805 (fedora)
Note(s): 2015-12-01
Ph.D.
Engineering and Computer Science, Electrical Engineering and Computer Engineering
Doctoral
This record was generated from author submitted information.
Subject(s): MEMS -- Resonator -- Filter -- Quality Factor -- Piezoelectric -- Diamond -- Silicon -- Thin Film -- Micro Fabrication -- Resonant System
Persistent Link to This Record: http://purl.flvc.org/ucf/fd/CFE0005945
Restrictions on Access: public 2015-12-15
Host Institution: UCF

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