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Reactive sputter deposition of lithium phosphorus oxynitride thin films, a Li battery solid state electrolyte

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Date Issued:
2015
Abstract/Description:
Lithium phosphorus oxy-nitride (LiPON) thin films are widely studied and used as a thin film electrolyte for lithium ion battery applications. LiPON thin films may be prepared by many techniques, but RF sputter deposition is most frequently used and was investigated in this dissertation, in spite of its low deposition rate, because of it offers more reliable and controllable processing. This dissertation includes the methodologies of sputter deposition and materials characterization of the LiPON thin film electrolytes.The LiPON thin films were deposited under varying conditions of process gas, substrate bias, and deposition temperature. To understand the variations in ionic conductivity observed, the films were extensively characterized to examine structural and compositional differences, including examination by x-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectroscopy (ICP/OES), and spectroscopic ellipsometry. In addition, film density, and the intrinsic stress of the deposited films were also studied.The highest ionic conductivity of 9.8 x 10-6 S/cm was obtained at elevated deposition temperature and is correlated to a reduced density of defects, as indicated from the optical characterization.
Title: Reactive sputter deposition of lithium phosphorus oxynitride thin films, a Li battery solid state electrolyte.
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Name(s): Mani, Prabhu Doss, Author
Coffey, Kevin, Committee Chair
Heinrich, Helge, Committee Member
Hickman, James, Committee Member
Sundaram, Kalpathy, Committee Member
University of Central Florida, Degree Grantor
Type of Resource: text
Date Issued: 2015
Publisher: University of Central Florida
Language(s): English
Abstract/Description: Lithium phosphorus oxy-nitride (LiPON) thin films are widely studied and used as a thin film electrolyte for lithium ion battery applications. LiPON thin films may be prepared by many techniques, but RF sputter deposition is most frequently used and was investigated in this dissertation, in spite of its low deposition rate, because of it offers more reliable and controllable processing. This dissertation includes the methodologies of sputter deposition and materials characterization of the LiPON thin film electrolytes.The LiPON thin films were deposited under varying conditions of process gas, substrate bias, and deposition temperature. To understand the variations in ionic conductivity observed, the films were extensively characterized to examine structural and compositional differences, including examination by x-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectroscopy (ICP/OES), and spectroscopic ellipsometry. In addition, film density, and the intrinsic stress of the deposited films were also studied.The highest ionic conductivity of 9.8 x 10-6 S/cm was obtained at elevated deposition temperature and is correlated to a reduced density of defects, as indicated from the optical characterization.
Identifier: CFE0005835 (IID), ucf:50929 (fedora)
Note(s): 2015-08-01
Ph.D.
Engineering and Computer Science, Materials Science Engineering
Doctoral
This record was generated from author submitted information.
Subject(s): LiPON -- ionic conductivity -- deposition temperature -- substrate bias -- XPS -- ICP/OES
Persistent Link to This Record: http://purl.flvc.org/ucf/fd/CFE0005835
Restrictions on Access: public 2015-08-15
Host Institution: UCF

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