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- Title
- Design and Implementation of Silicon-Based MEMS Resonators for Application in Ultra Stable High Frequency Oscillators.
- Creator
-
Shahraini, Sarah, Abdolvand, Reza, Gong, Xun, Sundaram, Kalpathy, Kapoor, Vikram, Rajaraman, Swaminathan, University of Central Florida
- Abstract / Description
-
The focus of this work is to design and implement resonators for ultra-stable high-frequency ((>)100MHz) silicon-based MEMS oscillators. Specifically, two novel types of resonators are introduced that push the performance of silicon-based MEMS resonators to new limits. Thin film Piezoelectric-on-Silicon (TPoS) resonators have been shown to be suitable for oscillator applications due to their combined high quality factor, coupling efficiency, power handling and doping-dependent temperature...
Show moreThe focus of this work is to design and implement resonators for ultra-stable high-frequency ((>)100MHz) silicon-based MEMS oscillators. Specifically, two novel types of resonators are introduced that push the performance of silicon-based MEMS resonators to new limits. Thin film Piezoelectric-on-Silicon (TPoS) resonators have been shown to be suitable for oscillator applications due to their combined high quality factor, coupling efficiency, power handling and doping-dependent temperature-frequency behavior. This thesis is an attempt to utilize the TPoS platform and optimize it for extremely stable high-frequency oscillator applications.To achieve the said objective, two main research venues are explored. Firstly, quality factor is systematically studied and anisotropy of single crystalline silicon (SCS) is exploited to enable high-quality factor side-supported radial-mode (aka breathing mode) TPoS disc resonators through minimization of anchor-loss. It is then experimentally demonstrated that in TPoS disc resonators with tethers aligned to [100], unloaded quality factor improves from ~450 for the second harmonic mode at 43 MHz to ~11,500 for the eighth harmonic mode at 196 MHz. Secondly, thickness quasi-Lam(&)#233; modes are studied and demonstrated in TPoS resonators for the first time. It is shown that thickness quasi-Lam(&)#233; modes (TQLM) could be efficiently excited in silicon with very high quality factor (Q). A quality factor of 23.2 k is measured in vacuum at 185 MHz for a fundamental TQLM-TPoS resonators designed within a circular acoustic isolation frame. Quality factor of 12.6 k and 6 k are also measured for the second- and third- harmonic TQLM TPoS resonators at 366 MHz and 555 MHz respectively. Turn-over temperatures between 40 (&)deg;C to 125 (&)deg;C are also designed and measured for TQLM TPoS resonators fabricated on degenerately N-doped silicon substrates. The reported extremely high quality factor, very low motional resistance, and tunable turn-over temperatures (>)80 (&)#186;C make these resonators a great candidate for ultra-stable oven-controlled high-frequency MEMS oscillators.
Show less - Date Issued
- 2019
- Identifier
- CFE0007861, ucf:52775
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0007861
- Title
- RAPID PROTOTYPING OF MICROFLUIDIC PACKAGES.
- Creator
-
Pepper, Michael, Cho, Hyoung, University of Central Florida
- Abstract / Description
-
In the area of MEMS there exists a tremendous need for communication between the micro-device and the macro world. A standard protocol or at least multiple standards would be of great use. Electrical connections have been standardized for many uses and configurations by the integrated circuit industry. Standardization in the IC industry has created a marketplace for digital devices unprecedented. In addition to the number of "off the shelf" products available, there exists the possibility for...
Show moreIn the area of MEMS there exists a tremendous need for communication between the micro-device and the macro world. A standard protocol or at least multiple standards would be of great use. Electrical connections have been standardized for many uses and configurations by the integrated circuit industry. Standardization in the IC industry has created a marketplace for digital devices unprecedented. In addition to the number of "off the shelf" products available, there exists the possibility for consumers to mix and match many devices from many different manufacturers. This research proposes some similar solutions as those for integrated circuits for fluid connections and mechanical configurations that could be used on many different devices. In conjunction with offering the capability to facilitate communication between the micro and macro worlds, the packaging solutions should be easy to fabricate. Many devices are by nature non-standard, unique, designs that make a general solution difficult. At the same time, the micro-devices themselves will inevitably need to evolve some standardization. In BioMEMS devices the packaging issue is concerned with delivering a sample to the device, conducting the sample to the sensor or sensors, and removing the sample. Conducting the sample to the sensor or sensors is usually done with microchannels created by standard MEMS fabrication techniques. Many current designs then utilize conventional machining techniques to create the inlet and outlet for the sample. This work proposes a rapid prototyping method for creating the microchannel and inlet / outlet in simplified steps. The packages developed from this process proved to be an effective solution for many applications.
Show less - Date Issued
- 2006
- Identifier
- CFE0001341, ucf:46979
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0001341
- Title
- ANALOG TEMPERATURE CONTROL CIRCUIT FOR A THIN-FILM PIEZOELECTRIC-ON-SUBSTRATE MICROELECTROMECHANICAL SYSTEMS OSCILLATOR.
- Creator
-
Hofstee, Heather, Abdolvand, Reza, University of Central Florida
- Abstract / Description
-
The objective and motivation for this project is to design a low-power, low-noise oven-control circuit to optimize the stability of a MEMS oscillator. MEMS oscillators can be fabricated using conventional semiconductor manufacturing methods and can often be assembled in packages smaller than those of traditional crystal oscillators. However, one of their largest disadvantages currently is their high temperature coefficient of frequency (TCF), causing MEMS oscillators to be especially...
Show moreThe objective and motivation for this project is to design a low-power, low-noise oven-control circuit to optimize the stability of a MEMS oscillator. MEMS oscillators can be fabricated using conventional semiconductor manufacturing methods and can often be assembled in packages smaller than those of traditional crystal oscillators. However, one of their largest disadvantages currently is their high temperature coefficient of frequency (TCF), causing MEMS oscillators to be especially sensitive to temperature changes. Hence, this project focuses on designing a printed circuit board that will allow the user to manually tune a current passing through a resonator wire-bonded to the board to elevate the resonator temperature. This will ensure that the device's resonance frequency stays largely constant and that the oscillator provides a very stable signal.
Show less - Date Issued
- 2018
- Identifier
- CFH2000419, ucf:45748
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFH2000419
- Title
- Simulation of a Capacitive Micromachined Ultrasonic Transducer with a Parylene Membrane and Graphene Electrodes.
- Creator
-
Sadat, David, Chen, Quanfang, Xu, Yunjun, Foroosh, Hassan, University of Central Florida
- Abstract / Description
-
Medical ultrasound technology accounts for over half of all imaging tests performed worldwide. In comparison to other methods, ultrasonic imaging is more portable and lower cost, and is becoming more accessible to remote regions where traditionally no medical imaging can be done. However, conventional ultrasonic imaging systems still rely on expensive PZT-based ultrasound probes that limit broader applications. In addition, the resolution of PZT based transducers is low due to the limitation...
Show moreMedical ultrasound technology accounts for over half of all imaging tests performed worldwide. In comparison to other methods, ultrasonic imaging is more portable and lower cost, and is becoming more accessible to remote regions where traditionally no medical imaging can be done. However, conventional ultrasonic imaging systems still rely on expensive PZT-based ultrasound probes that limit broader applications. In addition, the resolution of PZT based transducers is low due to the limitation in hand-fabrication methods of the piezoelectric ceramics.Capacitive Micromachined Ultrasonic Transducers (CMUTs) appears as an alternative to the piezoelectric (PZT) ceramic based transducer for ultrasound medical imaging. CMUTs show better ultrasound transducer design for batch fabrication, higher axial resolution of images, lower fabrication costs of the elements, ease of fabricating large arrays of cells using MEMS fabrication, and the extremely important potential to monolithically integrate the 2D transducer arrays directly with IC circuits for real-time 3D imaging.Currently most efforts on CMUTs are silicon based. Problems with current silicon-based CMUT designs include low pressure transmission and high-temperature fabrication processes. The pressure output from the silicon based CMUTs cells during transmission are too low when compared to commercially available PZT transducers, resulting in relatively blurry ultrasound images. The fabrication of the silicon-based cells, although easier than PZT transducers, still suffers from inevitable high temperature process and require specialized and expensive equipment. Manufacturing at an elevated temperature hinders the capability of fabricating front end analog processing IC circuits, thus it is difficult to achieve true 3D/4D imaging. Therefore novel low temperature fabrication with a low cost nature is needed. A polymer (Parylene) based CMUTs transducer has been investigated recently at UCF and aims to overcome limitations posted from the silicon based counterparts. This thesis describes the numerical simulation work and proposed fabrication steps of the Parylene based CMUT. The issue of transducer cost and pressure transmission is addressed by proposing the use of low cost and low temperature Chemical Vapor Deposition (CVD) fabrication of Parylene-C as the structural membrane plus graphene for the membrane electrodes. This study focuses mainly on comparing traditional silicon-based CMUT designs against the Parylene-C/Graphene CMUT based transducer, by using MEMS modules in COMSOL. For a fair comparison, single CMUT cells are modeled and held at a constant diameter and the similar operational frequency at the structural center. The numerical CMUT model is characterized for: collapse voltage, membrane deflection profile, center frequency, peak output pressure transmission over the membrane surface, and the sensitivity to the change in electrode surface charge. This study took the unique approaches in defining sensitivity of the CMUT by calculating the membrane response and the change in the electrode surface charge due to an incoming pressure wave. Optimal design has been achieved based on the simulation results. In comparison to silicon based CMUTs, the Parylene/Graphene based CMUT transducer produces 55% more in volume displacement and more than 35% in pressure output. The thesis has also laid out the detailed fabrication processes of the Parylene/Graphene based CMUT transducers. Parylene/Graphene based ultrasonic transducers can find wide applications in both medical imaging and Non destructive evaluation (NDE).
Show less - Date Issued
- 2012
- Identifier
- CFE0004333, ucf:49458
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0004333
- Title
- Wearable Passive Wireless MEMS Respiration Sensor.
- Creator
-
Moradian, Sina, Abdolvand, Reza, Sundaram, Kalpathy, Kapoor, Vikram, University of Central Florida
- Abstract / Description
-
In this study a passive sensor that wirelessly monitors the profile of the human respiratory system is presented. The sensor was designed to be wearable, weighs less than 10 grams and is durable. The sensor is made of a RF piezoelectric MEMS resonator and an ultra-high frequency antenna made of a thin metal film formed on a flexible substrate . The resonance frequency of the TPoS resonator shifts as a function of condensation and evaporation of water vapor on the surface of the resonator and...
Show moreIn this study a passive sensor that wirelessly monitors the profile of the human respiratory system is presented. The sensor was designed to be wearable, weighs less than 10 grams and is durable. The sensor is made of a RF piezoelectric MEMS resonator and an ultra-high frequency antenna made of a thin metal film formed on a flexible substrate . The resonance frequency of the TPoS resonator shifts as a function of condensation and evaporation of water vapor on the surface of the resonator and changes in resonator's temperature. These parameters change in each in response to inspiration and expiration and a wireless measurement system detects the frequency shift of the sensor and converts it into the respiration profile. The respiration profile of a healthy human subject is measured and presented for a transmitter to sensor to receiver distance of ~25cm.
Show less - Date Issued
- 2017
- Identifier
- CFE0006628, ucf:51279
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0006628
- Title
- NON-SILICON MICROFABRICATED NANOSTRUCTURED CHEMICAL SENSORS FOR ELECTRIC NOSE APPLICATION.
- Creator
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Gong, Jianwei, Chen, Quanfang, University of Central Florida
- Abstract / Description
-
A systematic investigation has been performed for "Electric Nose", a system that can identify gas samples and detect their concentrations by combining sensor array and data processing technologies. Non-silicon based microfabricatition has been developed for micro-electro-mechanical-system (MEMS) based gas sensors. Novel sensors have been designed, fabricated and tested. Nanocrystalline semiconductor metal oxide (SMO) materials include SnO2, WO3 and In2O3 have been studied for gas sensing...
Show moreA systematic investigation has been performed for "Electric Nose", a system that can identify gas samples and detect their concentrations by combining sensor array and data processing technologies. Non-silicon based microfabricatition has been developed for micro-electro-mechanical-system (MEMS) based gas sensors. Novel sensors have been designed, fabricated and tested. Nanocrystalline semiconductor metal oxide (SMO) materials include SnO2, WO3 and In2O3 have been studied for gas sensing applications. Different doping material such as copper, silver, platinum and indium are studied in order to achieve better selectivity for different targeting toxic gases including hydrogen, carbon monoxide, hydrogen sulfide etc. Fundamental issues like sensitivity, selectivity, stability, temperature influence, humidity influence, thermal characterization, drifting problem etc. of SMO gas sensors have been intensively investigated. A novel approach to improve temperature stability of SMO (including tin oxide) gas sensors by applying a temperature feedback control circuit has been developed. The feedback temperature controller that is compatible with MEMS sensor fabrication has been invented and applied to gas sensor array system. Significant improvement of stability has been achieved compared to SMO gas sensors without temperature compensation under the same ambient conditions. Single walled carbon nanotube (SWNT) has been studied to improve SnO2 gas sensing property in terms of sensitivity, response time and recovery time. Three times of better sensitivity has been achieved experimentally. The feasibility of using TSK Fuzzy neural network algorithm for Electric Nose has been exploited during the research. A training process of using TSK Fuzzy neural network with input/output pairs from individual gas sensor cell has been developed. This will make electric nose smart enough to measure gas concentrations in a gas mixture. The model has been proven valid by gas experimental results conducted.
Show less - Date Issued
- 2005
- Identifier
- CFE0000377, ucf:46328
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0000377
- Title
- DIMESIONALITY ASPECTS OF NANO MICRO INTEGRATED METAL OXIDE BASED EARLY STAGE LEAK DETECTION ROOM TEMPERATURE HYDROGEN SENSOR.
- Creator
-
Deshpande, Sameer, Seal, Sudipta, University of Central Florida
- Abstract / Description
-
Detection of explosive gas leaks such as hydrogen (H2) becomes key element in the wake of counter-terrorism threats, introduction of hydrogen powered vehicles and use of hydrogen as a fuel for space explorations. In recent years, a significant interest has developed on metal oxide nanostructured sensors for the detection of hydrogen gas. Gas sensors properties such as sensitivity, selectivity and response time can be enhanced by tailoring the size, the shape, the structure and the surface of...
Show moreDetection of explosive gas leaks such as hydrogen (H2) becomes key element in the wake of counter-terrorism threats, introduction of hydrogen powered vehicles and use of hydrogen as a fuel for space explorations. In recent years, a significant interest has developed on metal oxide nanostructured sensors for the detection of hydrogen gas. Gas sensors properties such as sensitivity, selectivity and response time can be enhanced by tailoring the size, the shape, the structure and the surface of the nanostructures. Sensor properties (sensitivity, selectivity and response time) are largely modulated by operating temperature of the device. Issues like instability of nanostructures at high temperature, risk of hydrogen explosion and high energy consumption are driving the research towards detection of hydrogen at low temperatures. At low temperatures adsorption of O2- species on the sensor surface instead of O- (since O- species reacts easily with hydrogen) result in need of higher activation energy for hydrogen and adsorbed species interaction. This makes hydrogen detection at room temperature a challenging task. Higher surface area to volume ratio (resulting higher reaction sites), enhanced electronic properties by varying size, shape and doping foreign impurities (by modulating space charge region) makes nanocrystalline materials ideal candidate for room temperature gas sensing applications. In the present work various morphologies of nanostructured tin oxide (SnO2) and indium (In) doped SnO2 and titanium oxide (titania, TiO2) were synthesized using sol-gel, hydrothermal, thermal evaporation techniques and successfully integrated with the micro-electromechanical devices H2 at ppm-level (as low as 100ppm) has been successfully detected at room temperature using the SnO2 nanoparticles, SnO2 (nanowires) and TiO2 (nanotubes) based MEMS sensors. While sensor based on indium doped tin oxide showed the highest sensitivity (S =Ra/Rg= 80000) and minimal response time (10sec.). Highly porous SnO2 nanoparticles thin film (synthesized using template assisted) showed response time of about 25 seconds and sensitivity 4. The one dimensional tin oxide nanostructures (nanowires) based sensor showed a sensitivity of 4 and response time of 20 sec. Effect of aspect ratio of the nanowires on diffusion of hydrogen molecules in the tin oxide nanowires, effect of catalyst adsorption on nanowire surface and corresponding effect on sensor properties has been studied in detail. Nanotubes of TiO2 prepared using hydrothermal synthesis showed a sensitivity 30 with response time as low as 20 seconds where as, TiO2 nanotubes synthesized using anodization showed poor sensitivity. The difference is mainly attributed to the issues related to integration of the anodized nanotubes with the MEMS devices. The effect of MEMS device architecture modulation, such as, finger spacing, number and length of fingers and electrode materials were studied. It has been found that faster sensor response (~ 10 sec) was observed for smaller finger spacing. A diffusion model is proposed for elucidating the effect of inter-electrode distance variation on conductance change of a nano-micro integrated hydrogen sensor for room temperature operation. Both theoretical and experimental results showed a faster response upon exposure to hydrogen when sensor electrode gap was smaller. Also, a linear increase in the sensor sensitivity from 500 to 80000 was observed on increasing the electrode spacing from 2 to 20 μm. The improvement in sensitivity is attributed to the higher reactive sites available for the gaseous species to react on the sensor surface. This phenomenon also correlated to surface adsorbed oxygen vacancies (O-) and the rate of change of surface adsorbed oxygen vacancies. This dissertation studied in detail dimensionality aspects of materials as well as device in detecting hydrogen at room temperature.
Show less - Date Issued
- 2007
- Identifier
- CFE0001985, ucf:47420
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0001985
- Title
- MAGNETICALLY DEFLECTABLE MEMS ACTUATORS FOR OPTICAL SENSING APPLICATIONS.
- Creator
-
Montgomery, Matthew, Cho, Hyoung-Jin, University of Central Florida
- Abstract / Description
-
In this work, new small deflection magnetic actuators have been proposed, designed, and tested for applications in Surface Enhanced Raman Scattering optical sensors. Despite the fact that SERS sensors have been shown to increase Raman over ten orders of magnitude for molecular detection, several technological challenges have prevented the design of practical sensors, such as making SERS sensors that can efficiently detect a wide variety of molecules. Since the optimum signal-to-noise in SERS...
Show moreIn this work, new small deflection magnetic actuators have been proposed, designed, and tested for applications in Surface Enhanced Raman Scattering optical sensors. Despite the fact that SERS sensors have been shown to increase Raman over ten orders of magnitude for molecular detection, several technological challenges have prevented the design of practical sensors, such as making SERS sensors that can efficiently detect a wide variety of molecules. Since the optimum signal-to-noise in SERS occurs at different excitation wavelengths for different molecules, individual metal nanostructures need to be designed and fabricated for each independent chemical species. One possible solution to this problem is to tune the plasmon resonance frequency of the metal nanoparticles to eliminate the need for individually optimized particles. In order to achieve a tunable local dielectric environment, and thus allow for control over the resonance frequency of metal nanoparticles, a new SERS sensor geometry is proposed and a large deflection magnetic actuator is fabricated and tested as a starting point for the design of a small deflection magnetic actuator. Using the newly developed SERS geometry and the optimized fabrication processing techniques, two small deflection magnetic actuator beam structures were designed, fabricated, and tested. These devices utilizes an off-chip electromagnet source able to produce a magnetic force of approximately 14 uN on the on-chip nickel film generating deflections up to 139 nm for the straight beam device and 164 nm for the curved beam device. In the process of characterizing the newly developed small deflection magnetic actuator, an integrated magnetic actuator with electrostatic restoration geometry was conceived. This device was designed to meet the specifications of the small deflection magnetic actuator as well as eliminate the need of an off-chip magnetic source and fully integrate the process atop the metal nanoparticle arrays. Using adhesive iron based magnetic strips as the magnetic drive source, circular NiFe beams with 1, 2, 3, and 4 mm diameters were designed and simulated. Calculations predicted maximum achievable actuation of up to 2.5 um. Processing steps were laid out for a set of integrated devices as a possible predecessor to the newly designed small deflection magnetic actuator.
Show less - Date Issued
- 2009
- Identifier
- CFE0002823, ucf:48057
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0002823
- Title
- LOW POWER CMOS CIRCUIT DESIGN AND RELIABILITY ANALYSIS FOR WIRELESS MEMS SENSORS.
- Creator
-
Sadat, Md Anwar, Yuan, Jiann, University of Central Florida
- Abstract / Description
-
A sensor node 'AccuMicroMotion' is proposed that has the ability to detect motion in 6 degrees of freedom for the application of physiological activity monitoring. It is expected to be light weight, low power, small and cheap. The sensor node may collect and transmit 3 axes of acceleration and 3 axes of angular rotation signals from MEMS transducers wirelessly to a nearby base station while attached to or implanted in human body. This dissertation proposes a wireless electronic system-on-a...
Show moreA sensor node 'AccuMicroMotion' is proposed that has the ability to detect motion in 6 degrees of freedom for the application of physiological activity monitoring. It is expected to be light weight, low power, small and cheap. The sensor node may collect and transmit 3 axes of acceleration and 3 axes of angular rotation signals from MEMS transducers wirelessly to a nearby base station while attached to or implanted in human body. This dissertation proposes a wireless electronic system-on-a-single-chip to implement the sensor in a traditional CMOS process. The system is low power and may operate 50 hours from a single coin cell battery. A CMOS readout circuit, an analog to digital converter and a wireless transmitter is designed to implement the proposed system. In the architecture of the 'AccuMicroMotion' system, the readout circuit uses chopper stabilization technique and can resolve DC to 1 KHz and 200 nV signals from MEMS transducers. The base band signal is digitized using a 10-bit successive approximation register analog to digital converter. Digitized outputs from up to nine transducers can be combined in a parallel to serial converter for transmission by a 900 MHz RF transmitter that operates in amplitude shift keying modulation technique. The transmitter delivers a 2.2 mW power to a 50 Ù antenna. The system consumes an average current of 4.8 mA from a 3V supply when 6 sensors are in operation and provides an overall 60 dB dynamic range. Furthermore, in this dissertation, a methodology is developed that applies accelerated electrical stress on MOS devices to extract BSIM3 models and RF parameters through measurements to perform comprehensive study, analysis and modeling of several analog and RF circuits under hot carrier and breakdown degradation.
Show less - Date Issued
- 2004
- Identifier
- CFE0000304, ucf:46318
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0000304
- Title
- UV-LIGA COMPATIBLE ELECTROFORMED NANO-STRUCTURED MATERIALS FOR MICRO MECHANICAL SYSTEMS.
- Creator
-
LI, BO, Chen, Quanfang, University of Central Florida
- Abstract / Description
-
UV-LIGA is a microfabrication process realzed by material deposition through microfabricated molds. UV photolithography is conducted to pattern precise thick micro molds using UV light sensitive materials, mostly SU-8, and electroforming is performed to fabricate micro metallic structures defined by the micro molds. Therefore, UV-LIGA is a bottom-up in situ material-addition process. UV-LIGA has received broad attention recently than LIGA a micro molding fabrication process using X-ray to...
Show moreUV-LIGA is a microfabrication process realzed by material deposition through microfabricated molds. UV photolithography is conducted to pattern precise thick micro molds using UV light sensitive materials, mostly SU-8, and electroforming is performed to fabricate micro metallic structures defined by the micro molds. Therefore, UV-LIGA is a bottom-up in situ material-addition process. UV-LIGA has received broad attention recently than LIGA a micro molding fabrication process using X-ray to pattern the micro molds. LIGA is an expansive and is limited in access. In comparing to LIGA, the UV-LIGA is a cost effective process, and is widely accessible and safe. Therefore, it has been extensively used for the fabrication of metallic micro-electro-mechanical-systems (MEMS). The motivation of this research was to study micro mechanical systems fabricated with nano-structured metallic materials via UV-LIGA process. Various micro mechanical systems with high-aspect-ratio and thick metallic structures have been developed and are presented in this desertation. A novel micro mechanical valve has been developed with nano-structured nickel realized with UV-LIGA fabrication technique. Robust compact valves are crucial for space applications where payload and rubstaness are critically concerned. Two types of large flow rate robust passive micro check valve arrays have been designed, fabricated and tested for robust hydraulic actuators. The first such micro valve developed employs nanostructured nickel as the valve flap and single-crystal silicon as the substrates to house inlet and outlet channels. The Nano-structured nickel valve flap was fabricated using the UV-LIGA process developed and the microchannels were fabricated by deep reactive etching (DRIE) method. The valves were designed to operate under a high pressure (>10MPa), able to operate at high frequencies (>10kHz) in cooperating with the PZT actuator to produce large flow rates (>10 cc/s). The fabricated microvalves weigh 0.2 gram, after packing with a novel designated valve stopper. The tested results showed that the micro valve was able to operate at up to 14kHz. This is a great difference in comparison to traditional mechanical valves whose operations are limited to 500 Hz or less. The advantages of micro machined valves attribute to the scaling laws. The second type of micro mechanical valves developed is a in situ assembled solid metallic (nickel) valves. Both the valve substrates for inlet and outlet channels and the valve flap, as well as the valve stopper were made by nickel through a UV-LIGA fabrication process developed. Continuous multiple micro molds fabrication and molding processes were performed. Final micro mechanical valves were received after removing the micro molds used to define the strutures. There is no any additional machining process, such as cutting or packaging. The alignment for laminated fabrication was realized under microscope, therefore it is a highly precise in situ fabrication process. Testing results show the valve has a forward flow rate of19 cc/s under a pressure difference of 90 psi. The backward flow rate of 0.023 cc/s, which is negligible (0.13%). Nano-structured nickel has also been used to develop laminated (sandwiched) micro cryogenic heater exchanger with the UV-LIGA process. Even though nickel is apparently not a good thermal conductor at room temperature, it is a good conductor at cryogentic temerpature since its thermal conductivity increases to 1250 W/k·m at 77K. Micro patterned SU-8 molds and electroformed nickel have been developed to realize the sandwiched heat exchanger. The SU-8 mold (200mm x 200mm x50mm) array was successfully removed after completing the nickel electroforming. The second layer of patterned SU-8 layer (200mm x 200mm x50mm, as a thermal insulating layer) was patterned and aligned on the top of the electroformed nickel structure to form the laminated (sandwiched) micro heat exchanger. The fabricated sandwiched structure can withstand cryogenic temperature (77K) without any damages (cracks or delaminations). A study on nanocomposite for micro mechanical systems using UV-LIGA compatible electroforming process has been performed. Single-walled carbon nanotubes (SWNTs) have been proven excellent mechanical properties and thermal conductive properties, such as high strength and elastic modulus, negative coefficient of thermal expansion (CTE) and a high thermal conductivity. These properties make SWNT an excellent reinforcement in nanocomposite for various applications. However, there has been a challenge of utilizing SWNTs for engineering applications due to difficulties in quality control and handling too small (1-2nm in diameter). A novel copper/SWNT nanocomposite has been developed during this dissertational research. The goal of this research was to develop a heat spreader for high power electronics (HPE). Semiconductors for HPE, such as AlGaN/GaN high electron mobility transistors grown on SiC dies have a typical CTE about 4~6x10-6/k while most metallic heat spreaders such as copper have a CTE of more than 10x10-6/k. The SWNTs were successfully dispersed in the copper matrix to form the SWNT/Cu nano composite. The tested composite density is about 7.54 g/cm3, which indicating the SWNT volumetric fraction of 18%. SEM pictures show copper univformly coated on SWNT (worm-shaped structure). The measured CTE of the nanocomposite is 4.7 x 10-6/°C, perfectly matching that of SiC die (3.8 x 10-6/°C). The thermal conductivity derived by Wiedemann-Franz law after measuring composit's electrical conductivity, is 588 W/m-K, which is 40% better than that of pure copper. These properties are extremely important for the heat spreader/exchanger to remove the heat from HPE devices (SiC dies). Meanwhile, the matched CTE will reduce the resulted stress in the interface to prevent delaminations. Therefore, the naocomposite developed will be an excellent replacement material for the CuMo currently used in high power radar, and other HPE devices under developing. The mechanical performance and reliability of micro mechanical devices are critical for their application. In order to validate the design & simulation results, a direct (tensile) test method was developed to test the mechanical properties of the materials involved in this research, including nickel and SU-8. Micro machined specimens were fabricated and tested on a MTS Tytron Micro Force Tester with specially designed gripers. The tested fracture strength of nanostructured nickel is 900±70 MPa and of 50MPa for SU-8, resepctively which are much higher than published values.
Show less - Date Issued
- 2005
- Identifier
- CFE0000478, ucf:46372
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0000478
- Title
- POLYMER-DERIVED CERAMICS: ELECTRONIC PROPERTIES AND APPLICATION.
- Creator
-
xu, weixing, An, Linan, University of Central Florida
- Abstract / Description
-
In this work, we studied the electronic behavior of polymer-derived ceramics (PDCs) and applied them for the synthesis of carbon nanotube reinforced ceramic nanocomposites and ceramic MEMS (Micro-Electro-Mechanical Systems) structures. Polymer-derived SiCN ceramics were synthesized by pyrolysis of a liquid polyureasilazane with dicumyl peroxide as thermal initiator. The structural evolution during pyrolysis and post-annealing was studied using FTIR, solid state NMR and Raman. The results...
Show moreIn this work, we studied the electronic behavior of polymer-derived ceramics (PDCs) and applied them for the synthesis of carbon nanotube reinforced ceramic nanocomposites and ceramic MEMS (Micro-Electro-Mechanical Systems) structures. Polymer-derived SiCN ceramics were synthesized by pyrolysis of a liquid polyureasilazane with dicumyl peroxide as thermal initiator. The structural evolution during pyrolysis and post-annealing was studied using FTIR, solid state NMR and Raman. The results revealed that the resultant ceramics consisted of SiCxNx-4 as major building units. These units were connected with each other through C-C/C=C bonds or by shearing N/C. The amount of sp2 free carbon strongly depends on composition and processing condition. Electron paramagnetic resonance (EPR) was used to investigate electronic structure of PDCs; the results revealed that the materials contain unpaired electron centers associated with carbons. Electronic behavior of the SiCN ceramics was studied by measuring their I-V curves, temperature dependence of d.c.-conductivities and impendence. The results revealed that the SiCN ceramics exhibited typical amorphous semiconductor behavior, and their conductivity varied in a large range. The results also revealed that the materials contain more than one phase, which have the different electronic behavior. We explored possibility of using polymer-derived ceramics to make ceramic MEMS for harsh environmental applications with a lithography technique. The cure depth of the polymer precursor was measured as a function of UV intensity and exposure time. The experimental data was compared with the available theoretical model. A few typical SiCN parts were fabricated by lithography technique. We also prepared carbon nanotube reinforced ceramic nanocomposites by using PDC processing. The microstructures of the composites were characterized using SEM and TEM; the mechanical properties were studied characterized using nanoindentation. The significant improvement in mechanical properties was observed for the nanocomposites.
Show less - Date Issued
- 2006
- Identifier
- CFE0001228, ucf:46885
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0001228
- Title
- APPLICATION OF ALKYLSILANE SELF-ASSEMBLED MONOLAYERS FOR CELLPATTERNING AND DEVELOPMENT OF BIOLOCIAL MICROELECTROMECHANICALSYSTEMS.
- Creator
-
Wilson, Kerry, Hickman, James, University of Central Florida
- Abstract / Description
-
Advances in microfabrication and surface chemistry techniques have provided a new paradigm for the creation of in vitro systems for studying problems in biology and medicine in ways that were previously not practical. The ability to create devices with micro- to nano-scale dimensions provides the opportunity to non-invasively interrogate and monitor biological cells and tissue in large arrays and in a high-throughput manner. These systems hold the potential to, in time, revolutionize the way...
Show moreAdvances in microfabrication and surface chemistry techniques have provided a new paradigm for the creation of in vitro systems for studying problems in biology and medicine in ways that were previously not practical. The ability to create devices with micro- to nano-scale dimensions provides the opportunity to non-invasively interrogate and monitor biological cells and tissue in large arrays and in a high-throughput manner. These systems hold the potential to, in time, revolutionize the way problems in biology and medicine are studied in the form of point-of-care devices, lab-on-chip devices, and biological microelectromechanical systems (BioMEMS). With new in vitro models, it will be possible to reduce the overall cost of medical and biological research by performing high-throughput experiments while maintaining control over a wide variety of experimental variables. A critical aspect of developing these sorts of systems, however, is controlling the device/tissue interface. The surface chemistry of cell-biomaterial and protein-biomaterial interactions is critical for long-term efficacy and function of such devices. The work presented here is focused on the application of surface and analytical chemistry techniques for better understanding the interface of biological elements with silica substrates and the development a novel Bio-MEMS device for studying muscle and neuromuscular biology. A novel surface patterning technique based on the use of a polyethylene glycol (PEG) silane self-assembled monolayer (SAM) as a cytophobic surface and the amine-terminated silane diethyeletriamine (DETA) as a cytophilic surface was developed for patterning a variety of cell types (e.g. skeletal muscle, and neural cells) over long periods of time (over 40 days) with high fidelity to the patterns. This method was then used to pattern embryonic rat skeletal muscle and motor neurons onto microfabricated silicon cantilevers creating a novel biological microelectromechanical system (BioMEMS) for studying muscle and the neuromuscular junction. This device was then used to study the effect of exogenously applied substances such as growth factors and toxins. Furthermore, a whispering-gallery mode (WGM) biosensor was developed for measuring the adsorption of various proteins onto glass microspheres coated with selected silane SAMS commonly used in BioMEMS system. With this biosensor it was possible to measure the kinetics of protein adsorption onto alkylsilane SAMS, in a real-time and label-free manner.
Show less - Date Issued
- 2009
- Identifier
- CFE0002631, ucf:48210
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0002631
- Title
- ELECTROMECHANICAL LIFTING ACTUATION OF A MEMS CANTILEVER AND NANO-SCALE ANALYSIS OF DIFFUSION IN SEMICONDUCTOR DEVICE DIELECTRICS.
- Creator
-
Rezadad, Imen, Peale, Robert, Del Barco, Enrique, Tetard, Laurene, Prenitzer, Brenda, University of Central Florida
- Abstract / Description
-
This dissertation presents experimental and theoretical studies of physical phenomena in micro- and nano-electronic devices. Firstly, a novel and unproven means of electromechanical actuation in a micro-electro-mechanical system (MEMS) cantilever was investigated. In nearly all MEMS devices, electric forces cause suspended components to move toward the substrate. I demonstrated a design with the unusual and potentially very useful property of having a suspended MEMS cantilever lift away from...
Show moreThis dissertation presents experimental and theoretical studies of physical phenomena in micro- and nano-electronic devices. Firstly, a novel and unproven means of electromechanical actuation in a micro-electro-mechanical system (MEMS) cantilever was investigated. In nearly all MEMS devices, electric forces cause suspended components to move toward the substrate. I demonstrated a design with the unusual and potentially very useful property of having a suspended MEMS cantilever lift away from the substrate. The effect was observed by optical micro-videography, by electrical sensing, and it was quantified by optical interferometry. The results agree with predictions of analytic and numerical calculations. One potential application is infrared sensing in which absorbed radiation changes the temperature of the cantilever, changing the duty cycle of an electrically-driven, repetitively closing micro-relay.Secondly, ultra-thin high-k gate dielectric layers in two 22 nm technology node semiconductor devices were studied. The purpose of the investigation was to characterize the morphology and composition of these layers as a means to verify whether the transmission electron microscope (TEM) with energy dispersive spectroscopy (EDS) could sufficiently resolve the atomic diffusion at such small length scales. Results of analytic and Monte-Carlo numerical calculations were compared to empirical data to validate the ongoing viability of TEM EDS as a tool for nanoscale characterization of semiconductor devices in an era where transistor dimensions will soon be less than 10 nm.
Show less - Date Issued
- 2015
- Identifier
- CFE0006228, ucf:51075
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0006228
- Title
- Smart Grasping using Laser and Tactile Array Sensors for UCF-MANUS- An Intelligent Assistive Robotic Manipulator.
- Creator
-
Prakash, Kiran, Behal, Aman, Boloni, Ladislau, Haralambous, Michael, University of Central Florida
- Abstract / Description
-
This thesis presents three improvements in the UCF MANUS Assistive Robotic Manipulator's grasping abilities. Firstly, the robot can now grasp objects that are deformable, heavy and have uneven contact surfaces without undergoing slippage during robotic operations, e.g. paper cup, filled water bottle. This is achieved by installing a high precision non-contacting Laser sensor1 that runs with an algorithm that processes raw-input data from the sensor, registers smallest variation in the...
Show moreThis thesis presents three improvements in the UCF MANUS Assistive Robotic Manipulator's grasping abilities. Firstly, the robot can now grasp objects that are deformable, heavy and have uneven contact surfaces without undergoing slippage during robotic operations, e.g. paper cup, filled water bottle. This is achieved by installing a high precision non-contacting Laser sensor1 that runs with an algorithm that processes raw-input data from the sensor, registers smallest variation in the relative position of the object with respect to the gripper. Secondly, the robot can grasp objects that are as light and small as single cereal grain without deforming it. To achieve this a MEMS Barometer based tactile sensor array device that can measure force that are as small as 1 gram equivalent is embedded into the gripper to enhance pressure sensing capabilities. Thirdly, the robot gripper gloves are designed aesthetically and conveniently to accommodate existing and newly added sensors using a 3D printing technology that uses light weight ABS plastic as a fabrication material. The newly designed system was experimented and found that a high degree of adaptability for different kinds of objects can be attained with a better performance than the previous system.
Show less - Date Issued
- 2016
- Identifier
- CFE0006164, ucf:51119
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0006164
- Title
- Comparison Of Casimir , Elastic, Electrostatic Forces For A Micro-Cantilever.
- Creator
-
Alhasan, Ammar, Peale, Robert, Del Barco, Enrique, Chow, Lee, University of Central Florida
- Abstract / Description
-
Casimir force is a cause of stiction (adhesion) between metal surfaces in Micro-Electro Mechanical Systems (MEMS). Casimir Force depends strongly on the separation of the two surfaces and the contact area. This thesis reviews the theory and prior experimental demonstrations of the Casimir force. Then the Casimir attractive force is calculated for a particular MEMS cantilever device, in which the metal cantilever tip is required to repeatedly touch and release from a metal tip pad on the...
Show moreCasimir force is a cause of stiction (adhesion) between metal surfaces in Micro-Electro Mechanical Systems (MEMS). Casimir Force depends strongly on the separation of the two surfaces and the contact area. This thesis reviews the theory and prior experimental demonstrations of the Casimir force. Then the Casimir attractive force is calculated for a particular MEMS cantilever device, in which the metal cantilever tip is required to repeatedly touch and release from a metal tip pad on the substrate surface in response to a periodic driving electrostatic force. The elastic force due to the bending of the cantilever support arms is also a consideration in the device operation. The three forces are calculated analytically and compared as a function of cantilever tip height. Calculation of the electrostatic force uses coefficients of capacitance and electrostatic induction determined numerically by the finite element method, including the effect of permittivity for the structural oxide. A condition on the tip area to allow electrostatic release of the tip from the surface against Casimir sticking and elastic restoring forces is established.
Show less - Date Issued
- 2014
- Identifier
- CFE0005123, ucf:50713
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0005123
- Title
- Performance optimization of lateral-mode thin-film piezoelectric-on-substrate resonant systems.
- Creator
-
Fatemi, Hedy, Abdolvand, Reza, Sundaram, Kalpathy, Malocha, Donald, Gong, Xun, Cho, Hyoung Jin, University of Central Florida
- Abstract / Description
-
The main focus of this dissertation is to characterize and improve the performance of thin-film piezoelectric-on-substrate (TPoS) lateral-mode resonators and filters. TPoS is a class of piezoelectric MEMS devices which benefits from the high coupling coefficient of the piezoelectric transduction mechanism while taking advantage of superior acoustic properties of a substrate. The use of lateral-mode TPoS designs allows for fabrication of dispersed-frequency filters on a single substrate, thus...
Show moreThe main focus of this dissertation is to characterize and improve the performance of thin-film piezoelectric-on-substrate (TPoS) lateral-mode resonators and filters. TPoS is a class of piezoelectric MEMS devices which benefits from the high coupling coefficient of the piezoelectric transduction mechanism while taking advantage of superior acoustic properties of a substrate. The use of lateral-mode TPoS designs allows for fabrication of dispersed-frequency filters on a single substrate, thus significantly reducing the size and manufacturing cost of devices. TPoS filters also offer a lower temperature coefficient of frequency, and better power handling capability compared to rival technologies all in a very small footprint.Design and fabrication process of the TPoS devices is discussed. Both silicon and diamond substrates are utilized for fabrication of TPoS devices and results are compared. Specifically, the superior acoustic properties of nanocrystalline diamond in scaling the frequency and energy density of the resonators is highlighted in comparison with silicon. The performance of TPoS devices in a variety of applications is reported. These applications include lateral-mode TPoS filters with record low IL values (as low as 2dB) and fractional bandwidth up to 1%, impedance transformers, very low phase noise oscillators, and passive wireless temperature sensors.
Show less - Date Issued
- 2015
- Identifier
- CFE0005945, ucf:50805
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0005945
- Title
- Vanadium Oxide Microbolometers with Patterned Gold Black or Plasmonic Resonant Absorbers.
- Creator
-
Smith, Evan, Peale, Robert, Khondaker, Saiful, Dove, Adrienne, Boreman, Glenn, University of Central Florida
- Abstract / Description
-
High sensitivity uncooled microbolometers are necessary to meet the needs of the next generation of infrared detectors, which seek low power consumption and production cost without sacrificing performance. Presented here is the design, fabrication, and characterization of a microbolometer with responsivity enhanced by novel highly absorptive coatings. The device utilizes a gold-doped vanadium oxide film in a standard air bridge design. Performance estimations are calculated from current...
Show moreHigh sensitivity uncooled microbolometers are necessary to meet the needs of the next generation of infrared detectors, which seek low power consumption and production cost without sacrificing performance. Presented here is the design, fabrication, and characterization of a microbolometer with responsivity enhanced by novel highly absorptive coatings. The device utilizes a gold-doped vanadium oxide film in a standard air bridge design. Performance estimations are calculated from current theory, and efforts to maximize signal to noise ratio are shown and evaluated. Most notably, presented are the experimental results and analysis from the integration of two different absorptive coatings: a patterned gold black film and a plasmonic resonant structure.Infrared-absorbing gold black was selectively patterned onto the active surfaces of the detector. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves gold black's near unity absorptance. This patterned gold black also survives the dry-etch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers. Infrared responsivity is improved 70% for mid-wave IR and 22% for long-wave IR. The increase in the thermal time constant caused by the additional mass of gold black is a modest 15%. However, this film is sensitive to thermal processing; experimental results indicate a decrease in absorptance upon device heating.Sub-wavelength resonant structures designed for long-wave infrared (LWIR) absorption have also been investigated. Dispersion of the dielectric refractive index provides for multiple overlapping resonances that span the 8-12 ?m LWIR wavelength band, a broader range than can be achieved using the usual resonance quarter-wave cavity engineered into the air-bridge structures. Experimental measurements show an increase in responsivity of 96% for mid-wave IR and 48% for long-wave IR, while thermal response time only increases by 16% due to the increased heat capacity. The resonant structures are not as susceptible to thermal processing as are the gold black films. This work suggests that plasmonic resonant structures can be an ideal method to improve detector performance for microbolometers.
Show less - Date Issued
- 2015
- Identifier
- CFE0006004, ucf:51026
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0006004
- Title
- NOVEL CONCEPTUAL DESIGN AND ANLYSIS OF POLYMER DERIVED CERAMIC MEMS SENSORS FOR GAS TURBINE ENVIRONMENT.
- Creator
-
Nagaiah, Narasimha, Kapat, Jay, University of Central Florida
- Abstract / Description
-
Technical challenges for developing micro sensors for Ultra High Temperature and turbine applications lie in that the sensors have to survive extremely harsh working conditions that exist when converting fuel to energy. These conditions include high temperatures (500-1500°C), elevated pressures (200-400 psi), pressure oscillations, corrosive environments (oxidizing conditions, gaseous alkali, and water vapors), surface coating or fouling, and high particulate loading. Several technologies are...
Show moreTechnical challenges for developing micro sensors for Ultra High Temperature and turbine applications lie in that the sensors have to survive extremely harsh working conditions that exist when converting fuel to energy. These conditions include high temperatures (500-1500°C), elevated pressures (200-400 psi), pressure oscillations, corrosive environments (oxidizing conditions, gaseous alkali, and water vapors), surface coating or fouling, and high particulate loading. Several technologies are currently underdeveloped for measuring these parameters in turbine engines. One of them is an optical-based non-contact technology. However, these nondirective measuring technologies lack the necessary accuracy, at least at present state. An alternative way to measure these parameters without disturbing the working environments is using MEMS type sensors. Currently, the techniques under development for such harsh environment applications are silicon carbide (SiC) and silicon nitrite (Si3N4) based ceramic MEMS sensors. But those technologies present some limitation such as narrow processing method, high cost (materials and processing cost), and limited using temperatures (typically < 800 C). In this research we propose to develop two sensors based on recently developed polymer-derived ceramics (PDCs): Constant Temperature Hot wire Anemometer, temperature/heat-flux sensor for turbine applications. PDC is a new class of high temperature ceramics. As we shall describe below, many unique features of PDCs make them particularly suitable for the proposed sensors, including: excellent thermo-mechanical properties at high temperatures, enable high temperature operation of the devices; various well-developed processing technologies, such as injection molding,photolithography, embossing, DRIE etching and precise machining, can be used for the fabrication of the devices; and tunable electric conductivity, enable the proposed sensors fabricated from similar materials, thus reliability considerations associated with thermal mismatch, which is a big concern when using MEMS-based sensors at elevated temperatures, will be minimized.
Show less - Date Issued
- 2006
- Identifier
- CFE0001285, ucf:46892
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0001285
- Title
- An Integrated Hydrodynamic-Marsh Model with Applications in Fluvial, Marine, and Mixed Estuarine Systems.
- Creator
-
Alizad, Karim, Hagen, Scott, Medeiros, Stephen, Wang, Dingbao, Weishampel, John, University of Central Florida
- Abstract / Description
-
Coastal wetlands experience fluctuating productivity when subjected to various stressors. One of the most impactful stressors is sea level rise (SLR) associated with global warming. Research has shown that under SLR, salt marshes may not have time to establish an equilibrium with sea level and may migrate landward or become open water. Salt marsh systems play an important role in the coastal ecosystem by providing intertidal habitats and food for birds, fish, crabs, mussels, and other animals...
Show moreCoastal wetlands experience fluctuating productivity when subjected to various stressors. One of the most impactful stressors is sea level rise (SLR) associated with global warming. Research has shown that under SLR, salt marshes may not have time to establish an equilibrium with sea level and may migrate landward or become open water. Salt marsh systems play an important role in the coastal ecosystem by providing intertidal habitats and food for birds, fish, crabs, mussels, and other animals. They also protect shorelines by dissipating flow and damping wave energy through an increase in drag forces. Due to the serious consequences of losing coastal wetlands, evaluating the potential future changes in their structure and distribution is necessary in order for coastal resource managers to make informed decisions. The objective of this study was to develop a spatially-explicit model by connecting a hydrodynamic model and a parametric marsh model and using it to assess the dynamic effects of SLR on salt marsh systems within three National Estuarine Research Reserves (NERRs) in the Northern Gulf of Mexico. Coastal salt marsh systems are an excellent example of complex interrelations between physics and biology, and the resulting benefits to humanity. In order to investigate salt marsh productivity under projected SLR scenarios, a depth integrated hydrodynamic model was coupled to a parametric marsh model to capture the dynamic feedback loop between physics and biology. The hydrodynamic model calculates mean high water (MHW) and mean low water (MLW) within the river and tidal creeks by harmonic analysis of computed tidal constituents. The responses of MHW and MLW to SLR are nonlinear due to localized changes in the salt marsh platform elevation and biomass productivity (which influences bottom friction). Spatially-varying MHW and MLW are utilized in a two-dimensional application of the parametric Marsh Equilibrium Model to capture the effects of the hydrodynamics on biomass productivity and salt marsh accretion, where accretion rates are dependent on the spatial distribution of sediment deposition in the marsh. This model accounts both organic (decomposition of in-situ biomass) and inorganic (allochthonous) marsh platform accretion and the effects of spatial and temporal biomass density changes on tidal flows. The coupled hydro-marsh model, herein referred to as HYDRO-MEM, leverages an optimized coupling time step at which the two models exchange information and update the solution to capture the system's response to projected linear and non-linear SLR rates.Including accurate marsh table elevations into the model is crucial to obtain meaningful biomass productivity projections. A lidar-derived Digital Elevation Model (DEM) was corrected by incorporating Real Time Kinematic (RTK) surveying elevation data. Additionally, salt marshes continually adapt in an effort to reach an equilibrium within the ideal range of relative SLR and depth of inundation. The inputs to the model, specifically topography and bottom roughness coefficient, are updated using the biomass productivity results at each coupling time step to capture the interaction between the marsh and hydrodynamic models.The coupled model was tested and validated in the Timucuan marsh system, located in northeastern Florida by computing projected biomass productivity and marsh platform elevation under two SLR scenarios. The HYDRO-MEM model coupling protocol was assessed using a sensitivity study of the influence of coupling time step on the biomass productivity results with a comparison to results generated using the MEM approach only. Subsequently, the dynamic effects of SLR were investigated on salt marsh productivity within the three National Estuarine Research Reserves (NERRs) (Apalachicola, FL, Grand Bay, MS, and Weeks Bay, AL) in the Northern Gulf of Mexico (NGOM). These three NERRS are fluvial, marine and mixed estuarine systems, respectively. Each NERR has its own unique characteristics that influence the salt marsh ecosystems. The HYDRO-MEM model was used to assess the effects of four projections of low (0.2 m), intermediate-low (0.5 m), intermediate-high (1.2 m) and high (2.0 m) SLR on salt marsh productivity for the year 2100 for the fluvial dominated Apalachicola estuary, the marine dominated Grand Bay estuary, and the mixed Weeks Bay estuary. The results showed increased productivity under the low SLR scenario and decreased productivity under the intermediate-low, intermediate-high, and high SLR. In the intermediate-high and high SLR scenarios, most of the salt marshes drowned (converted to open water) or migrated to higher topography. These research presented herein advanced the spatial modeling and understanding of dynamic SLR effects on coastal wetland vulnerability. This tool can be used in any estuarine system to project salt marsh productivity and accretion under sea level change scenarios to better predict possible responses to projected SLR scenarios. The findings are not only beneficial to the scientific community, but also are useful to restoration, planning, and monitoring activities in the NERRs. Finally, the research outcomes can help policy makers and coastal managers to choose suitable approaches to meet the specific needs and address the vulnerabilities of these three estuaries, as well as other wetland systems in the NGOM and marsh systems anywhere in the world.
Show less - Date Issued
- 2016
- Identifier
- CFE0006523, ucf:51360
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0006523
- Title
- LIQUID CRYSTAL OPTICS FOR COMMUNICATIONS, SIGNAL PROCESSING AND 3-D MICROSCOPIC IMAGING.
- Creator
-
Khan, Sajjad, Riza, Nabeel, University of Central Florida
- Abstract / Description
-
This dissertation proposes, studies and experimentally demonstrates novel liquid crystal (LC) optics to solve challenging problems in RF and photonic signal processing, freespace and fiber optic communications and microscopic imaging. These include free-space optical scanners for military and optical wireless applications, variable fiber-optic attenuators for optical communications, photonic control techniques for phased array antennas and radar, and 3-D microscopic imaging. At the heart of...
Show moreThis dissertation proposes, studies and experimentally demonstrates novel liquid crystal (LC) optics to solve challenging problems in RF and photonic signal processing, freespace and fiber optic communications and microscopic imaging. These include free-space optical scanners for military and optical wireless applications, variable fiber-optic attenuators for optical communications, photonic control techniques for phased array antennas and radar, and 3-D microscopic imaging. At the heart of the applications demonstrated in this thesis are LC devices that are non-pixelated and can be controlled either electrically or optically. Instead of the typical pixel-by-pixel control as is custom in LC devices, the phase profile across the aperture of these novel LC devices is varied through the use of high impedance layers. Due to the presence of the high impedance layer, there forms a voltage gradient across the aperture of such a device which results in a phase gradient across the LC layer which in turn is accumulated by the optical beam traversing through this LC device. The geometry of the electrical contacts that are used to apply the external voltage will define the nature of the phase gradient present across the optical beam. In order to steer a laser beam in one angular dimension, straight line electrical contacts are used to form a one dimensional phase gradient while an annular electrical contact results in a circularly symmetric phase profile across the optical beam making it suitable for focusing the optical beam. The geometry of the electrical contacts alone is not sufficient to form the linear and the quadratic phase profiles that are required to either deflect or focus an optical beam. Clever use of the phase response of a typical nematic liquid crystal (NLC) is made such that the linear response region is used for the angular beam deflection while the high voltage quadratic response region is used for focusing the beam. Employing an NLC deflector, a device that uses the linear angular deflection, laser beam steering is demonstrated in two orthogonal dimensions whereas an NLC lens is used to address the third dimension to complete a three dimensional (3-D) scanner. Such an NLC deflector was then used in a variable optical attenuator (VOA), whereby a laser beam coupled between two identical single mode fibers (SMF) was mis-aligned away from the output fiber causing the intensity of the output coupled light to decrease as a function of the angular deflection. Since the angular deflection is electrically controlled, hence the VOA operation is fairly simple and repeatable. An extension of this VOA for wavelength tunable operation is also shown in this dissertation. A LC spatial light modulator (SLM) that uses a photo-sensitive high impedance electrode whose impedance can be varied by controlling the light intensity incident on it, is used in a control system for a phased array antenna. Phase is controlled on the Write side of the SLM by controlling the intensity of the Write laser beam which then is accessed by the Read beam from the opposite side of this reflective SLM. Thus the phase of the Read beam is varied by controlling the intensity of the Write beam. A variable fiber-optic delay line is demonstrated in the thesis which uses wavelength sensitive and wavelength insensitive optics to get both analog as well as digital delays. It uses a chirped fiber Bragg grating (FBG), and a 1xN optical switch to achieve multiple time delays. The switch can be implemented using the 3-D optical scanner mentioned earlier. A technique is presented for ultra-low loss laser communication that uses a combination of strong and weak thin lens optics. As opposed to conventional laser communication systems, the Gaussian laser beam is prevented from diverging at the receiving station by using a weak thin lens that places the transmitted beam waist mid-way between a symmetrical transmitter-receiver link design thus saving prime optical power. LC device technology forms an excellent basis to realize such a large aperture weak lens. Using a 1-D array of LC deflectors, a broadband optical add-drop filter (OADF) is proposed for dense wavelength division multiplexing (DWDM) applications. By binary control of the drive signal to the individual LC deflectors in the array, any optical channel can be selectively dropped and added. For demonstration purposes, microelectromechanical systems (MEMS) digital micromirrors have been used to implement the OADF. Several key systems issues such as insertion loss, polarization dependent loss, wavelength resolution and response time are analyzed in detail for comparison with the LC deflector approach. A no-moving-parts axial scanning confocal microscope (ASCM) system is designed and demonstrated using a combination of a large diameter LC lens and a classical microscope objective lens. By electrically controlling the 5 mm diameter LC lens, the 633 nm wavelength focal spot is moved continuously over a 48 Ým range with measured 3-dB axial resolution of 3.1 Ým using a 0.65 numerical aperture (NA) micro-objective lens. The ASCM is successfully used to image an Indium Phosphide twin square optical waveguide sample with a 10.2 Ým waveguide pitch and 2.3 Ým height and width. Using fine analog electrical control of the LC lens, a super-fine sub-wavelength axial resolution of 270 nm is demonstrated. The proposed ASCM can be useful in various precision three dimensional imaging and profiling applications.
Show less - Date Issued
- 2005
- Identifier
- CFE0000750, ucf:46596
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0000750