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DESIGN OF SILICON CONTROLLED RECTIFERS FOR ROBUST ELECTROSTATIC DISCHARGE PROTECTION APPLICATIONS
Title
DESIGN OF SILICON CONTROLLED RECTIFERS FOR ROBUST ELECTROSTATIC DISCHARGE PROTECTION APPLICATIONS.
Creator
Liu, Zhiwei, Liou, Juin J., University of Central Florida
Abstract / Description
Electrostatic Discharge (ESD) phenomenon happens everywhere in our daily life. And it can occurs through the whole lifespan of an Integrated Circuit (IC), from the early wafer fabrication process, extending to assembly operation, and finally ending at the user's site. It has been reported that up to 35% of total IC field failures are ESD-induced, with estimated annual costs to the IC industry running to several billion dollars. The most straightforward way to avoid the ICs suffering from the...
Show moreElectrostatic Discharge (ESD) phenomenon happens everywhere in our daily life. And it can occurs through the whole lifespan of an Integrated Circuit (IC), from the early wafer fabrication process, extending to assembly operation, and finally ending at the user's site. It has been reported that up to 35% of total IC field failures are ESD-induced, with estimated annual costs to the IC industry running to several billion dollars. The most straightforward way to avoid the ICs suffering from the threatening of ESD damages is to develop on-chip ESD protection circuits which can afford a robust, low-impedance bypassing path to divert the ESD current to the ground. There are three different types of popular ESD protection devices widely used in the industry, and they are diodes or diodes string, Grounded-gate NMOS (GGNMOS) and Silicon Controlled Rectifier (SCR). Among these different protection solutions, SCR devices have the highest ESD current conduction capability due to the conductivity modulation effect. But SCR devices also have several shortcomings such as the higher triggering point, the lower clamping voltage etc, which will become obstacles for SCR to be widely used as an ESD protection solutions in most of the industry IC products. At first, in some applications with pin voltage goes below ground or above the VDD, dual directional protection between each two pins are desired. The traditional dual-directional SCR structures will consume a larger silicon area or lead to big leakage current issue due to the happening of punch-through effect. A new and improved SCR structure for low-triggering ESD applications has been proposed in this dissertation and successfully realized in a BiCMOS process. Such a structure possesses the desirable characteristics of a dual-polarity conduction, low trigger voltage, small leakage current, large failing current, adjustable holding voltage, and compact size. Another issue with SCR devices is its deep snapback or lower holding voltage, which normally will lead to the latch-up happen. To make SCR devices be immunity with latch-up, it is required to elevate its holding voltage to be larger than the circuits operational voltage, which can be several tens volts in modern power electronic circuits. Two possible solutions have been proposed to resolve this issue. One solution is accomplished by using a segmented emitter topology based on the concept that the holding voltage can be increased by reducing the emitter injection efficiency. Experimental data show that the new SCR can posses a holding voltage that is larger than 40V and a failure current It2 that is higher than 28mA/um. The other solution is accomplished by stacking several low triggering voltage high holding voltage SCR cells together. The TLP measurement results show that this novel SCR stacking structure has an extremely high holding voltage, very small snapback, and acceptable failure current. The High Holding Voltage Figure of Merit (HHVFOM) has been proposed to be a criterion for different high holding voltage solutions. The HHVFOM comparison of our proposed structures and the existing high holding voltage solutions also show the advantages of our work.
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Date Issued
2010
Identifier
CFE0003166, ucf:48616
Format
Document (PDF)
PURL
http://purl.flvc.org/ucf/fd/CFE0003166
Design, Simulation and Characterization of Novel Electrostatic Discharge Protection Devices and Circuits in Advanced Silicon Technologies
Title
Design, Simulation and Characterization of Novel Electrostatic Discharge Protection Devices and Circuits in Advanced Silicon Technologies.
Creator
Liang, Wei, Sundaram, Kalpathy, Fan, Deliang, Jin, Yier, Wei, Lei, Salcedo, Javier, University of Central Florida
Abstract / Description
Electrostatic Discharge (ESD) has been one of the major reliability concerns in the advanced silicon technologies and it becomes more important with technology scaling. It has been reported that more than 35% of the failures in integrated circuits (ICs) are ESD induced. ESD event is a phenomenon that a finite amount of charges transfer between two objects with different potential in a quite short time. Such event contains a large energy and the ICs without proper ESD protection could be...
Show moreElectrostatic Discharge (ESD) has been one of the major reliability concerns in the advanced silicon technologies and it becomes more important with technology scaling. It has been reported that more than 35% of the failures in integrated circuits (ICs) are ESD induced. ESD event is a phenomenon that a finite amount of charges transfer between two objects with different potential in a quite short time. Such event contains a large energy and the ICs without proper ESD protection could be destroyed easily, so ESD protection solutions are essential to semiconductor industry.ESD protection design consists of on-chip and off-chip ESD protection design, and the research works in this dissertation are all conducted in on-chip level, which incorporate the ESD protection devices and circuits into the microchip, to provide with basic ESD protection from manufacturing to customer use. The basic idea of ESD protection design is to provide a path with low impedance which directs most of the ESD current to flow through itself instead of the core circuit, and the ESD protection path must be robust enough to make sure that it does not fail before the core circuit. In this way, proper design on protection devices and circuits should be considered carefully. To assist the understanding and design of ESD protection, the ESD event in real world has been classified into a few ESD model including Human Body Model (HBM), Machine Model (MM), Charged Device Model (CDM), etc. Some mainstream testing method and industry standard are also introduced, including Transmission Line Pulse (TLP), and IEC 61000-4-2. ESD protection devices including diode, Gate-Grounded N-type MOSFET (GGNMOS), Silicon Controlled Rectifier (SCR) are basic elements for ESD protection design. In this dissertation, the device characteristics in ESD event and their applications are introduced. From the perspective of the whole chip ESD protection design, the concept of circuit level ESD protection and the ESD clamps are also briefly introduced. Technology Computer Aided Design (TCAD) and Simulation Program with Integrated Circuit Emphasis (SPICE) simulation is widely used in ESD protection design. In this dissertation, TCAD and SPICE simulation are carried out for a few times for both of pre-tapeout evaluation on characteristics of the proposed device and circuit and post-tapeout analysis on structure operating mechanism.Automotive electronics has been a popular subject in semiconductor industry, and due to the special requirement of the automotive applications like the capacitive pins, the ESD protection device used in such applications need to be specially designed. In this dissertation, a few SCRs without snapback are discussed in detail. To avoid core circuit damages caused the displacement current induced by the large snapback in conventional SCR, an eliminated/minimized snapback is preferred in a selection of the protection device. Two novel SCRs are proposed for High Voltage (HV), Medium Voltage (MV), and Low Voltage (LV) automotive ESD protection.The typical operating temperature for ICs is up to 125 (&)#186;C, however in automotive applications, the operating temperature may extend up to 850 (&)#186;C. In this way, the characteristics of the ESD protection device under the elevated temperatures will be an essential part to investigate for automotive ESD protection design. In this dissertation, the high temperature characteristics of ESD protection devices including diode and a few SCRs is measured and discussed in detail. TCAD simulation are also conducted to explain the underlying physical mechanism. This work provides with a useful insight and information to ESD protection design in high temperature applications.Besides the high temperature environment, ESD protection are also highly needed for electronics working in other extreme environment like the space. Space is an environment that contains kinds of radiation source and at the same time can generate abundant ESD. The ESD adhering to the space systems could be a potential threat to the space electronics. At the same time, the characteristics of the ESD protection part especially the basic protection device used in the space electronics could be influenced after the irradiation in the space. Therefore, the investigation of the radiation effects on ESD protection devices are necessary. In this dissertation, the total ionizing dose (TID) effects on ESD protection devices are investigated. The devices are irradiated with 1.5 MeV He+ and characterized with TLP tester. The pre- and post-irradiation characteristics are compared and the variation on key ESD parameters are analyzed and discussed. This work offers a useful insight on ESD devices' operation under TID and help with the device designing on ESD protection devices for space electronics.Single ESD protection devices are essential part constructing the ESD protection network, however the optimization on ESD clamp circuit design is also important on building an efficient whole chip ESD protection network. In this dissertation, the design and simulation of a novel voltage triggered ESD detection circuit are introduced. The voltage triggered ESD detection circuit is proposed in a 0.18 um CMOS technology. Comparing with the conventional RC based detection circuit, the proposed circuit realizes a higher triggering efficiency with a much smaller footprint, and is immune to false triggering under fast power-up events. The proposed circuit has a better sensitivity to ESD event and is more reliable in ESD protection applications.The leakage current has been a concern with the scaling down of the thickness of the gate oxide. Therefore, a proper design of the ESD clamp for power rail ESD protection need to be specially considered. In this dissertation, a design of a novel ESD clamp with low leakage current is analyzed. The proposed clamp realized a pretty low leakage current up to 12 nA, and has a smaller footprint than conventional design. It also has a long hold-on time under ESD event and a quick turn-off mechanism for false triggering. SPICE simulation is carried out to evaluate the operation of the proposed ESD clamp.
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Date Issued
2017
Identifier
CFE0007126, ucf:52298
Format
Document (PDF)
PURL
http://purl.flvc.org/ucf/fd/CFE0007126
Transient Safe Operating Area (TSOA) for ESD applications
Title
Transient Safe Operating Area (TSOA) for ESD applications.
Creator
Malobabic, Slavica, Liou, Juin, Shen, Zheng, Yuan, Jiann-Shiun, Vinson, James, University of Central Florida
Abstract / Description
A methodology to obtain design guidelines for gate oxide input pin protection and high voltage output pin protection in Electrostatic Discharge (ESD) time frame is developed through measurements and Technology Computer Aided Design (TCAD).A set of parameters based on transient measurements are used to define Transient Safe Operating Area (TSOA). The parameters are then used to assess effectiveness of protection devices for output and input pins.The methodology for input pins includes...
Show moreA methodology to obtain design guidelines for gate oxide input pin protection and high voltage output pin protection in Electrostatic Discharge (ESD) time frame is developed through measurements and Technology Computer Aided Design (TCAD).A set of parameters based on transient measurements are used to define Transient Safe Operating Area (TSOA). The parameters are then used to assess effectiveness of protection devices for output and input pins.The methodology for input pins includes establishing ESD design targets under Charged Device Model (CDM) type stress in low voltage MOS inputs.The methodology for output pins includes defining ESD design targets under Human Metal Model (HMM) type stress in high voltage Laterally Diffused MOS (LDMOS) outputs. First, the assessment of standalone LDMOS robustness is performed, followed by establishment of protection design guidelines. Secondly, standalone clamp HMM robustness is evaluated and a prediction methodology for HMM type stress is developed based on standardized testing. Finally, LDMOS and protection clamp parallel protection conditions are identified.
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Date Issued
2012
Identifier
CFE0004405, ucf:49363
Format
Document (PDF)
PURL
http://purl.flvc.org/ucf/fd/CFE0004405
Design of Novel Devices and Circuits for Electrostatic Discharge Protection Applications in Advanced Semiconductor Technologies
Title
Design of Novel Devices and Circuits for Electrostatic Discharge Protection Applications in Advanced Semiconductor Technologies.
Creator
Wang, Zhixin, Liou, Juin, Gong, Xun, Yuan, Jiann-Shiun, Jin, Yier, Vinson, James, University of Central Florida
Abstract / Description
Electrostatic Discharge (ESD), as a subset of Electrical Overstress (EOS), was reported to be in charge of more than 35% of failure in integrated circuits (ICs). Especially in the manufacturing process, the silicon wafer turns out to be a functional ICs after numerous physical, chemical and mechanical processes, each of which expose the sensitive and fragile ICs to ESD environment. In normal end-user applications, ESD from human and machine handling, surge and spike signals in the power...
Show moreElectrostatic Discharge (ESD), as a subset of Electrical Overstress (EOS), was reported to be in charge of more than 35% of failure in integrated circuits (ICs). Especially in the manufacturing process, the silicon wafer turns out to be a functional ICs after numerous physical, chemical and mechanical processes, each of which expose the sensitive and fragile ICs to ESD environment. In normal end-user applications, ESD from human and machine handling, surge and spike signals in the power supply, and wrong supplying signals, will probably cause severe damage to the ICs and even the whole systems. Generally, ESD protections are evaluated after wafer and even system fabrication, increasing the development period and cost if the protections cannot meet customer's requirements. Therefore, it is important to design and customize robust and area-efficient ESD protections for the ICs at the early development stage. As the technologies generally scaling down, however, ESD protection clamps remain comparable area consumption in the recent years because they provide the discharging path for the ESD energy which rarely scales down. Diode is the most simple and effective device for ESD protection in ICs, but the usage is significantly limited by its low turn-on voltage. MOS devices can be triggered by a dynamic-triggered RC circuit for IOs operating at low voltage, while the one triggered by a static-triggered network, e.g., zener-resistor circuit or grounded-gate configuration, provides a high trigger voltage for high-voltage applications. However, the relatively low current discharging capability makes MOS devices as the secondary choice. Silicon-controlled rectifier (SCR) has become famous due to its high robustness and area efficiency, compared to diode and MOS. In this dissertation, a comprehensive design methodology for SCR based on simulation and measurement are presented for different advanced commercial technologies. Furthermore, an ESD clamp is designed and verified for the first time for the emerging GaN technology.For the SCR, no matter what modification is going to be made, the first concern when drawing the layout is to determine the layout geometrical style, finger width and finger number. This problem for diode and MOS device were studied in detail, so the same method was usually used in SCR. The research in this dissertation provides a closer look into the metal layout effect to the SCR, finding out the optimized robustness and minimized side-effect can be obtained by using specific layout geometry. Another concern about SCR is the relatively low turn-on speed when the IOs under protection is stressed by ESD pulses having very fast rising time, e.g., CDM and IEC 61000-4-2 pulses. On this occasion a large overshoot voltage is generated and cause damage to internal circuit component like gate oxides of MOS devices. The key determination of turn-on speed of SCR is physically investigated, followed by a novel design on SCR by directly connecting the Anode Gate and Cathode Gate to form internal trigger (DCSCR), with improved performance verified experimentally in this dissertation. The overshoot voltage and trigger voltage of the DCSCR will be significantly reduced, in return a better protection for internal circuit component is offered without scarifying neither area or robustness. Even though two SCR's with single direction of ESD current path can be constructed in reverse parallel to form bidirectional protection to pins, stand-alone bidirectional SCR (BSCR) is always desirable for sake of smaller area. The inherent high trigger voltage of BSCR that only fit in high-voltage technologies is overcome by embedding a PMOS transistor as trigger element, making it highly suitable for low-voltage ESD protection applications. More than that, this modification simultaneously introduces benefits including high robustness and low overshoot voltage.For high voltage pins, however, it presents another story for ESD designs. The high operation voltages require that a high trigger voltage and high holding voltage, so as to reduce the false trigger and latch-up risk. For several capacitive pins, the displacement current induced by a large snapback will cause severe damage to internal circuits. A novel design on SCR is proposed to minimize the snapback with adjustable trigger and holding voltage. Thanks to the additional a PIN diode, the similar high robustness and stable thermal leakage performance to SCR is maintained. For academic purpose of ESD design, it is always difficult to obtain the complete process deck in TCAD simulation because those information are highly confidential to the companies. Another challenge of using TCAD is the difficulty of maintaining the accuracy of physics models and predicting the performance of the other structures. In this dissertation a TCAD-aid ESD design methodology is used to evaluate ESD performance before the silicon shuttle.GaN is a promising material for high-voltage high-power RF application compared to the GaAs. However, distinct from GaAs, the leaky problem of the schottky junction and the lack of choice of passive/active components in GaN technology limit the ESD protection design, which will be discussed in this dissertation. However, a promising ESD protection clamp is finally developed based on depletion-mode pHEMT with adjustable trigger voltage, reasonable leakage current and high robustness.
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Date Issued
2015
Identifier
CFE0006060, ucf:50989
Format
Document (PDF)
PURL
http://purl.flvc.org/ucf/fd/CFE0006060
DESIGN, CHARACTERIZATION AND COMPACT MODELING OF NOVEL SILICON CONTROLLED RECTIFIER (SCR)-BASED DEVICES FOR ELECTROSTATIC DISCHARGE (ESD) PROTECTION APPLICATIONS IN INTEGRATED CIRCUITS
Title
DESIGN, CHARACTERIZATION AND COMPACT MODELING OF NOVEL SILICON CONTROLLED RECTIFIER (SCR)-BASED DEVICES FOR ELECTROSTATIC DISCHARGE (ESD) PROTECTION APPLICATIONS IN INTEGRATED CIRCUITS.
Creator
Lou, Lifang, Liou, Juin J., University of Central Florida
Abstract / Description
Electrostatic Discharge (ESD), an event of a sudden transfer of electrons between two bodies at different potentials, happens commonly throughout nature. When such even occurs on integrated circuits (ICs), ICs will be damaged and failures result. As the evolution of semiconductor technologies, increasing usage of automated equipments and the emerging of more and more complex circuit applications, ICs are more sensitive to ESD strikes. Main ESD events occurring in semiconductor industry have...
Show moreElectrostatic Discharge (ESD), an event of a sudden transfer of electrons between two bodies at different potentials, happens commonly throughout nature. When such even occurs on integrated circuits (ICs), ICs will be damaged and failures result. As the evolution of semiconductor technologies, increasing usage of automated equipments and the emerging of more and more complex circuit applications, ICs are more sensitive to ESD strikes. Main ESD events occurring in semiconductor industry have been standardized as human body model (HBM), machine model (MM), charged device model (CDM) and international electrotechnical commission model (IEC) for control, monitor and test. In additional to the environmental control of ESD events during manufacturing, shipping and assembly, incorporating on-chip ESD protection circuits inside ICs is another effective solution to reduce the ESD-induced damage. This dissertation presents design, characterization, integration and compact modeling of novel silicon controlled rectifier (SCR)-based devices for on-chip ESD protection. The SCR-based device with a snapback characteristic has long been used to form a VSS-based protection scheme for on-chip ESD protection over a broad rang of technologies because of its low on-resistance, high failure current and the best area efficiency. The ESD design window of the snapback device is defined by the maximum power supply voltage as the low edge and the minimum internal circuitry breakdown voltage as the high edge. The downscaling of semiconductor technology keeps on squeezing the design window of on-chip ESD protection. For the submicron process and below, the turn-on voltage and sustain voltage of ESD protection cell should be lower than 10 V and higher than 5 V, respectively, to avoid core circuit damages and latch-up issue. This presents a big challenge to device/circuit engineers. Meanwhile, the high voltage technologies push the design window to another tough range whose sustain voltage, 45 V for instance, is hard for most snapback ESD devices to reach. Based on the in-depth elaborating on the principle of SCR-based devices, this dissertation first presents a novel unassisted, low trigger- and high holding-voltage SCR (uSCR) which can fit into the aforesaid ESD design window without involving any extra assistant circuitry to realize an area-efficient on-chip ESD protection for low voltage applications. The on-chip integration case is studied to verify the protection effectiveness of the design. Subsequently, this dissertation illustrate the development of a new high holding current SCR (HHC-SCR) device for high voltage ESD protection with increasing the sustain current, not the sustain voltage, of the SCR device to the latchup-immune level to avoid sacrificing the ESD protection robustness of the device. The ESD protection cells have been designed either by using technology computer aided design (TCAD) tools or through trial-and-error iterations, which is cost- or time-consuming or both. Also, the interaction of ESD protection cells and core circuits need to be identified and minimized at pre-silicon stage. It is highly desired to design and evaluate the ESD protection cell using simulation program with integrated circuit emphasis (SPICE)-like circuit simulation by employing compact models in circuit simulators. And the compact model also need to predict the response of ESD protection cells to very fast transient ESD events such as CDM event since it is a major ESD failure mode. The compact model for SCR-based device is not widely available. This dissertation develops a macromodeling approach to build a comprehensive SCR compact model for CDM ESD simulation of complete I/O circuit. This modeling approach offers simplicity, wide availability and compatibility with most commercial simulators by taking advantage of using the advanced BJT model, Vertical Bipolar Inter-Company (VBIC) model. SPICE Gummel-Poon (SGP) model has served the ICs industry well for over 20 years while it is not sufficiently accurate when using SGP model to build a compact model for ESD protection SCR. This dissertation seeks to compare the difference of SCR compact model built by using VBIC and conventional SGP in order to point out the important features of VBIC model for building an accurate and easy-CAD implement SCR model and explain why from device physics and model theory perspectives.
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Date Issued
2008
Identifier
CFE0002374, ucf:47788
Format
Document (PDF)
PURL
http://purl.flvc.org/ucf/fd/CFE0002374
Does Virtual Reality Elicit Physiological Arousal in Social Anxiety Disorder
Title
Does Virtual Reality Elicit Physiological Arousal in Social Anxiety Disorder.
Creator
Owens, Maryann, Beidel, Deborah, Cassisi, Jeffrey, Bowers, Clint, Neer, Sandra, University of Central Florida
Abstract / Description
The present study examined the ability of a Virtual Reality (VR) public speaking task to elicit physiological arousal in adults with SAD (n=25) and Controls (n=25). A behavioral assessment paradigm was employed to address three study objectives: (a) to determine whether the VR task can elicit significant increases in physiological response over baseline resting conditions (b) to determine if individuals with SAD have a greater increase from baseline levels of physiological and self-reported...
Show moreThe present study examined the ability of a Virtual Reality (VR) public speaking task to elicit physiological arousal in adults with SAD (n=25) and Controls (n=25). A behavioral assessment paradigm was employed to address three study objectives: (a) to determine whether the VR task can elicit significant increases in physiological response over baseline resting conditions (b) to determine if individuals with SAD have a greater increase from baseline levels of physiological and self-reported arousal during the in vivo speech task as opposed to the VR speech task and (c) to determine whether individuals with SAD experience greater changes in physiological and self-reported arousal during each speech task compared to controls. Results demonstrated that the VR task was able to elicit significant increases in heart rate, skin conductance, and respiratory sinus arrhythmia, but did not elicit as much physiological or self-reported arousal as the in vivo speech task. In addition, no differences were found between groups. Clinical implications of these findings are discussed.
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Date Issued
2013
Identifier
CFE0004906, ucf:49624
Format
Document (PDF)
PURL
http://purl.flvc.org/ucf/fd/CFE0004906
DESIGN AND CHARACTERIZATION OF NOVELDEVICES FOR NEW GENERATION OF ELECTROSTATICDISCHARGE (ESD) PROTECTION STRUCTURES
Title
DESIGN AND CHARACTERIZATION OF NOVELDEVICES FOR NEW GENERATION OF ELECTROSTATICDISCHARGE (ESD) PROTECTION STRUCTURES.
Creator
SALCEDO, Javier, Liou, Juin, University of Central Florida
Abstract / Description
The technology evolution and complexity of new circuit applications involve emerging reliability problems and even more sensitivity of integrated circuits (ICs) to electrostatic discharge (ESD)-induced damage. Regardless of the aggressive evolution in downscaling and subsequent improvement in applications' performance, ICs still should comply with minimum standards of ESD robustness in order to be commercially viable. Although the topic of ESD has received attention industry-wide, the...
Show moreThe technology evolution and complexity of new circuit applications involve emerging reliability problems and even more sensitivity of integrated circuits (ICs) to electrostatic discharge (ESD)-induced damage. Regardless of the aggressive evolution in downscaling and subsequent improvement in applications' performance, ICs still should comply with minimum standards of ESD robustness in order to be commercially viable. Although the topic of ESD has received attention industry-wide, the design of robust protection structures and circuits remains challenging because ESD failure mechanisms continue to become more acute and design windows less flexible. The sensitivity of smaller devices, along with a limited understanding of the ESD phenomena and the resulting empirical approach to solving the problem have yielded time consuming, costly and unpredictable design procedures. As turnaround design cycles in new technologies continue to decrease, the traditional trial-and-error design strategy is no longer acceptable, and better analysis capabilities and a systematic design approach are essential to accomplish the increasingly difficult task of adequate ESD protection-circuit design. This dissertation presents a comprehensive design methodology for implementing custom on-chip ESD protection structures in different commercial technologies. First, the ESD topic in the semiconductor industry is revised, as well as ESD standards and commonly used schemes to provide ESD protection in ICs. The general ESD protection approaches are illustrated and discussed using different types of protection components and the concept of the ESD design window. The problem of implementing and assessing ESD protection structures is addressed next, starting from the general discussion of two design methods. The first ESD design method follows an experimental approach, in which design requirements are obtained via fabrication, testing and failure analysis. The second method consists of the technology computer aided design (TCAD)-assisted ESD protection design. This method incorporates numerical simulations in different stages of the ESD design process, and thus results in a more predictable and systematic ESD development strategy. Physical models considered in the device simulation are discussed and subsequently utilized in different ESD designs along this study. The implementation of new custom ESD protection devices and a further integration strategy based on the concept of the high-holding, low-voltage-trigger, silicon controlled rectifier (SCR) (HH-LVTSCR) is demonstrated for implementing ESD solutions in commercial low-voltage digital and mixed-signal applications developed using complementary metal oxide semiconductor (CMOS) and bipolar CMOS (BiCMOS) technologies. This ESD protection concept proposed in this study is also successfully incorporated for implementing a tailored ESD protection solution for an emerging CMOS-based embedded MicroElectroMechanical (MEMS) sensor system-on-a-chip (SoC) technology. Circuit applications that are required to operate at relatively large input/output (I/O) voltage, above/below the VDD/VSS core circuit power supply, introduce further complications in the development and integration of ESD protection solutions. In these applications, the I/O operating voltage can extend over one order of magnitude larger than the safe operating voltage established in advanced technologies, while the IC is also required to comply with stringent ESD robustness requirements. A practical TCAD methodology based on a process- and device- simulation is demonstrated for assessment of the device physics, and subsequent design and implementation of custom P1N1-P2N2 and coupled P1N1-P2N2//N2P3-N3P1 silicon controlled rectifier (SCR)-type devices for ESD protection in different circuit applications, including those applications operating at I/O voltage considerably above/below the VDD/VSS. Results from the TCAD simulations are compared with measurements and used for developing technology- and circuit-adapted protection structures, capable of blocking large voltages and providing versatile dual-polarity symmetric/asymmetric S-type current-voltage characteristics for high ESD protection. The design guidelines introduced in this dissertation are used to optimize and extend the ESD protection capability in existing CMOS/BiCMOS technologies, by implementing smaller and more robust single- or dual-polarity ESD protection structures within the flexibility provided in the specific fabrication process. The ESD design methodologies and characteristics of the developed protection devices are demonstrated via ESD measurements obtained from fabricated stand-alone devices and on-chip ESD protections. The superior ESD protection performance of the devices developed in this study is also successfully verified in IC applications where the standard ESD protection approaches are not suitable to meet the stringent area constraint and performance requirement.
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Date Issued
2006
Identifier
CFE0001213, ucf:46942
Format
Document (PDF)
PURL
http://purl.flvc.org/ucf/fd/CFE0001213