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(1 - 8 of 8)
- Title
- Work Function Extraction of Indium Tin Oxide Used As Transparent Gate Electrode For MOSFET.
- Creator
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Nehate, Shraddha, Sundaram, Kalpathy, Kapoor, Vikram, Yuan, Jiann-Shiun, University of Central Florida
- Abstract / Description
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Recent commercialization has peaked interest in transparent conducting oxides being implemented in display technology. Indium Tin Oxide (ITO) is a popular transparent conducting oxide which has been utilized as high work function electrode in liquid crystal displays, solar cells, gas sensors and heat reflecting films. Indium Tin Oxide films exhibit excellent transmission characteristics in the visible and infrared spectrum while maintaining high electrical conductivity. High work function...
Show moreRecent commercialization has peaked interest in transparent conducting oxides being implemented in display technology. Indium Tin Oxide (ITO) is a popular transparent conducting oxide which has been utilized as high work function electrode in liquid crystal displays, solar cells, gas sensors and heat reflecting films. Indium Tin Oxide films exhibit excellent transmission characteristics in the visible and infrared spectrum while maintaining high electrical conductivity. High work function electrodes are used to inject holes into organic materials. In majority applications the ITO work function has an impact on the device performance as it affects the energy barrier height at the hetero-junction interface. Hence, the work function of ITO is of critical importance.In this thesis, the work function of ITO is extracted successfully from a Metal Oxide Semiconductor Field Effect Transistor (MOSFET) device for the first time. Two MOSFET devices are fabricated using a four level mask under exact same conditions. Aluminum metal is used as a drain and source contact for both MOSFETs. One of the MOSFET has aluminum gate contact and transparent conducting ITO is used as gate contact for the second MOSFET. From the threshold voltage equation of both the fabricated MOSFETs, work function of ITO is extracted. Further optical transmission studies of ITO performed in the visible spectra are also reported in this study.
Show less - Date Issued
- 2016
- Identifier
- CFE0006364, ucf:51534
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0006364
- Title
- RADIATION STUDIES OF THE TIN-DOPED MICROSCOPIC DROPLET LASER PLASMA LIGHT SOURCE SPECIFIC TO EUV LITHOGRAPHY.
- Creator
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Koay, Chiew-Seng, Richardson, Martin, University of Central Florida
- Abstract / Description
-
Extreme ultraviolet lithography(EUVL) is being developed worldwide as the next generation technology to be inserted in ~ 2009 for the mass production of IC chips with feature sizes
Show moreExtreme ultraviolet lithography(EUVL) is being developed worldwide as the next generation technology to be inserted in ~ 2009 for the mass production of IC chips with feature sizes <35 nm. One major challenge to its implementation is the development of a 13.5 nm EUV source of radiation that meets the requirements of current roadmap designs of the source of illumination in commercial EUVL scanners. The light source must be debris-free, in a free-space environment with the imaging EUV optics that must provide sufficient, narrow spectral band EUV power to print 100 wafers/hr. To meet this need, extensive studies on emission from a laser plasma source utilizing tin-doped droplet target was conducted. Presented in this work, are the many optical techniques such as spectroscopy, radiometry, and imaging, that were employed to characterize and optimize emission from the laser plasma source State of the art EUV spectrographs were employed to observe the source's spectrum under various laser irradiation conditions. Comparing the experimental spectra to those from theory, has allowed the determination of the Sn ion stages responsible for emitting into the useful EUV bandwidth. Experimental results were compared to spectral simulations obtained using Collisional-Radiative Equilibrium (CRE) model, as well. Moreover, extensive measurements surveying source emission from 2 nm to 30 nm, which is the region of the electromagnetic spectrum defined as EUV, was accomplished. Absolutely calibrated metrology was employed with the Flying Circus instrument from which the source's conversion efficiency (CE)--from laser to the useful EUV energy--was characterized under various laser irradiation conditions. Hydrodynamic simulations of the plasma expansion together with the CRE model predicted the condition at which optimum conversion could be attained. The condition was demonstrated experimentally, with the highest CE to be slightly above 2%, which is the highest value among all EUV source contenders. In addition to laser intensity, the CE was found to depend on the laser wavelength. For better understanding, this observation is compared to results from simulations. Through a novel approach in imaging, the size of the plasma was characterized by recording images of the plasma within a narrow band, around 13.5 nm. The size, approximately 100 ìm, is safely within the etendue limit set by the optical elements in the EUV scanner. Finally, the notion of irradiating the target with multiple laser beams was explored for the possibility of improving the source's conversion efficiency.
Show less - Date Issued
- 2006
- Identifier
- CFE0000938, ucf:46733
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0000938
- Title
- The Comradeship of the Open Road: The Identity and Influence of the Tin Can Tourists of the World on Automobility, Florida, and National Tourism.
- Creator
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Burel, David, Foster, Amy, Walker, Ezekiel, Lester, Connie, University of Central Florida
- Abstract / Description
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The identity of the Tin Can Tourists of the World, the first recreation automobile organization, has been poorly defined in the historical discourse, the factors contributing to the 1919 formation of the organization in Tampa, Florida represents a landmark shift in tourism in America towards the automobile.The group's subsequent solidification of a distinct identity gives insight beyond their organization. The thesis defines their identity as well as looks at their impact on American...
Show moreThe identity of the Tin Can Tourists of the World, the first recreation automobile organization, has been poorly defined in the historical discourse, the factors contributing to the 1919 formation of the organization in Tampa, Florida represents a landmark shift in tourism in America towards the automobile.The group's subsequent solidification of a distinct identity gives insight beyond their organization. The thesis defines their identity as well as looks at their impact on American automobility and tourism. The thesis therefore focuses on the previously undefined concept of recreational automobility giving it definition and showing how the group helped to define it.The group's early role in mass use and adaptation of the automobile for recreation represents the first steps in creating a market for recreational vehicles. The imposition of organization on the camping experience by the Tin Can Tourists and their influence on creating special places for the practice of their activities helped define recreational automobility.The footprint left by the Tin Can Tourists helped shape part of America's modern tourist industry. The legacy of their ideas about recreational automobility also suggests influence they had on later groups using recreational vehicles. This thesis examines and clarifies the identity and influence of the Tin Can Tourists of the World as a window on important trends in automobility and tourism.
Show less - Date Issued
- 2012
- Identifier
- CFE0004306, ucf:49472
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0004306
- Title
- SPECTROSCOPIC STUDIES OF LASER PLASMAS FOR EUV SOURCES.
- Creator
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George, Simi, Richardson, Martin, University of Central Florida
- Abstract / Description
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With the availability of high reflectivity multilayer mirrors and zone plate lenses, the EUV region (5nm - 40nm) of the electromagnetic spectrum is currently being explored for applications of nanoscale printing and imaging. Advances made in this area have consequences for many areas of science. Research for producing a compact, bright EUV source for laboratory use has gained momentum in recent years. For this study, EUV radiation is produced by irradiating target materials using a focused...
Show moreWith the availability of high reflectivity multilayer mirrors and zone plate lenses, the EUV region (5nm - 40nm) of the electromagnetic spectrum is currently being explored for applications of nanoscale printing and imaging. Advances made in this area have consequences for many areas of science. Research for producing a compact, bright EUV source for laboratory use has gained momentum in recent years. For this study, EUV radiation is produced by irradiating target materials using a focused laser beam. Focused laser beam ionizes the target to create a hot, dense, pulsed plasma source, where emission is a result of the relaxation of excited levels. Spectroscopy is used as the main diagnostic to obtain the spectral signature of the plasma. Spectral characteristics are used to deduce the physical state of plasma, thus enabling the tuning of laser irradiance conditions to maximize the needed emission bandwidth. Various target materials are studied, as well as different target geometries, with spectroscopy below 200 nm on pulsed micro-plasmas being a particularly daunting task. Total range spectroscopy from 1 nm to greater than 1 micron is completed for tin-doped spherical droplet plasma source. Reliable plasma diagnostics require both accurate measurements and solid theoretical support in order to interpret the experimental results. Using existing 1D-hydrocode, temperature and density characteristics of the expanding plasma is simulated for any set of experimental conditions. Existing atomic codes written for calculating one-electron radial wavefunctions with LS-coupling scheme via Hartree-Fock method is used in order to gain details of the ion stages, populations, transitions, etc, contributing to the spectral data.
Show less - Date Issued
- 2007
- Identifier
- CFE0001972, ucf:47433
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0001972
- Title
- UNSUPERVISED BUILDING DETECTION FROM IRREGULARLY SPACED LIDAR AND AERIAL IMAGERY.
- Creator
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Shorter, Nicholas, Kasparis, Takis, University of Central Florida
- Abstract / Description
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As more data sources containing 3-D information are becoming available, an increased interest in 3-D imaging has emerged. Among these is the 3-D reconstruction of buildings and other man-made structures. A necessary preprocessing step is the detection and isolation of individual buildings that subsequently can be reconstructed in 3-D using various methodologies. Applications for both building detection and reconstruction have commercial use for urban planning, network planning for mobile...
Show moreAs more data sources containing 3-D information are becoming available, an increased interest in 3-D imaging has emerged. Among these is the 3-D reconstruction of buildings and other man-made structures. A necessary preprocessing step is the detection and isolation of individual buildings that subsequently can be reconstructed in 3-D using various methodologies. Applications for both building detection and reconstruction have commercial use for urban planning, network planning for mobile communication (cell phone tower placement), spatial analysis of air pollution and noise nuisances, microclimate investigations, geographical information systems, security services and change detection from areas affected by natural disasters. Building detection and reconstruction are also used in the military for automatic target recognition and in entertainment for virtual tourism. Previously proposed building detection and reconstruction algorithms solely utilized aerial imagery. With the advent of Light Detection and Ranging (LiDAR) systems providing elevation data, current algorithms explore using captured LiDAR data as an additional feasible source of information. Additional sources of information can lead to automating techniques (alleviating their need for manual user intervention) as well as increasing their capabilities and accuracy. Several building detection approaches surveyed in the open literature have fundamental weaknesses that hinder their use; such as requiring multiple data sets from different sensors, mandating certain operations to be carried out manually, and limited functionality to only being able to detect certain types of buildings. In this work, a building detection system is proposed and implemented which strives to overcome the limitations seen in existing techniques. The developed framework is flexible in that it can perform building detection from just LiDAR data (first or last return), or just nadir, color aerial imagery. If data from both LiDAR and aerial imagery are available, then the algorithm will use them both for improved accuracy. Additionally, the proposed approach does not employ severely limiting assumptions thus enabling the end user to apply the approach to a wider variety of different building types. The proposed approach is extensively tested using real data sets and it is also compared with other existing techniques. Experimental results are presented.
Show less - Date Issued
- 2009
- Identifier
- CFE0002783, ucf:48125
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0002783
- Title
- Precision Metrology of Laser Plasmas in the XUV Band.
- Creator
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Szilagyi, John, Richardson, Martin, Sundaram, Kalpathy, Abdolvand, Reza, Baudelet, Matthieu, Shivamoggi, Bhimsen, University of Central Florida
- Abstract / Description
-
The XUV band, a region of light spanning the wavelength range of 5 - 200 nm, is located between the Ultraviolet and X-ray regions of the electromagnetic spectrum. It is further divided into a 100 - 200 nm region called the Vacuum Ultraviolet (VUV), and a 5 (-) 100 nm region called the Extreme Ultraviolet (EUV). Applications of this light have been slow to develop due to the lack of suitable sources, efficient optics, and sensitive detectors. Recently, many industries such as the semiconductor...
Show moreThe XUV band, a region of light spanning the wavelength range of 5 - 200 nm, is located between the Ultraviolet and X-ray regions of the electromagnetic spectrum. It is further divided into a 100 - 200 nm region called the Vacuum Ultraviolet (VUV), and a 5 (-) 100 nm region called the Extreme Ultraviolet (EUV). Applications of this light have been slow to develop due to the lack of suitable sources, efficient optics, and sensitive detectors. Recently, many industries such as the semiconductor manufacturing industry, medical surgery, micromachining, microscopy, and spectroscopy have begun to benefit from the short wavelengths and the high photon energies of this light. At present, the semiconductor chip industry is the primary reason for the investment in, and development of, XUV sources, optics, and detectors. The demand for high power EUV light sources at 13.5 nm wavelength is driven by the development of the next generation of semiconductor lithography tools. The development of these tools enables the continued reduction in size, and the increase in transistor density of semiconductor devices on a single chip. Further development and investigation of laser produced plasma EUV light sources is necessary to increase the average optical power and reliability. This will lead to an increase in the speed of EUV lithographic processes, which are necessary for future generations of advanced chip design, and high volume semiconductor manufacturing. Micromachining, lithography, and microscopy benefit from improvements in resolution due to the shorter wavelengths of light in the VUV band. In order to provide adequate illumination for these applications, sources are required which are brighter and have higher average power. Laser produced plasma (LPP) VUV light sources are used extensively for lithography and defect detection in semiconductor manufacturing. Reductions in the wavelength and increases in the average power will increase the rate and yield of chip manufacture, as well as reduce the costs of semiconductor manufacture.The work presented in this thesis, describes the development of two laser plasma source facilities in the Laser Plasma Laboratory at UCF, which were designed to investigate EUV and VUV laser plasma sources. The HP-EUV-Facility was developed to optimize and demonstrate a high power 13.5 nm EUV LPP source. This facility provides high resolution spectroscopy across 10.5 - 20 nm, and absolute energy measurement of 13.5 nm +/- 2% in 2? sr. The VUV-MS-Facility was developed to investigate VUV emission characteristics of laser plasmas of various target geometries and chemistries. This facility provides absolute calibrated emission spectra for the 124 - 250 nm wavelength range, in addition to, at wavelength plasma imaging. Calibrated emission spectra, in-band power, and conversion efficiency are presented in this work for gas targets of Argon, Krypton, and Xenon and solid targets of Silicon, Copper, Molybdenum, Indium, Tantalum, Tin, and Zinc, across the laser intensity range of 8.0x10^6 (-) 3.2x10^12 W/cm2.
Show less - Date Issued
- 2017
- Identifier
- CFE0006805, ucf:51793
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0006805
- Title
- NANOCLUSTER THIN-FILMS FOR SENSOR APPLICATIONS.
- Creator
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Serritella, Joseph, Malocha, Donald, University of Central Florida
- Abstract / Description
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The ability to sense gas such as methane can provide an early warning system to protect human lives. High demand for the ability to sense the world around us has provided an extensive area of research for sensor technology. In particular, current sensor technology, specifically for methane, has provided sensors that require a heated environment to function. The majority of current methane sensors function at temperatures between 150[degrees]C and 450[degrees]C . This thesis will explore an...
Show moreThe ability to sense gas such as methane can provide an early warning system to protect human lives. High demand for the ability to sense the world around us has provided an extensive area of research for sensor technology. In particular, current sensor technology, specifically for methane, has provided sensors that require a heated environment to function. The majority of current methane sensors function at temperatures between 150[degrees]C and 450[degrees]C . This thesis will explore an approach to produce a room temperature methane sensor. This research will investigate techniques to create a sensor that is responsive to methane at 23[degrees]C. The approach will use the integration of a very thin film, which changes its resistive properties when methane gas is applied, deposited atop the surface of a piezoelectric substrate. An aluminum thin film interdigital transducer will launch a surface acoustic wave (SAW) that travels under the sensor's gas-sensitive resistive thin film. The SAW/resistive film interaction changes the SAW amplitude, phase and delay. For this work, three films, tin dioxide (SnO2), zinc oxide (ZnO) and palladium (Pd) [1, 2] will be studied. Gas detection will be shown when combining ZnO and Pd, and, observable change in SAW propagation loss is measured when methane gas is present at the film.
Show less - Date Issued
- 2015
- Identifier
- CFH0004832, ucf:45481
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFH0004832
- Title
- Modeling and Spray Pyrolysis Processing of Mixed Metal Oxide Nano-Composite Gas Sensor Films.
- Creator
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Khatami, Seyed Mohammad Navid, Ilegbusi, Olusegun, Deng, Weiwei, Kassab, Alain, Coffey, Kevin, Divo, Eduardo, University of Central Florida
- Abstract / Description
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The role of sensor technology is obvious in improvement and optimization of many industrial processes. The sensor films, which are considered the core of chemical sensors, have the capability to detect the presence and concentration of a specific chemical substance. Such sensor films achieve selectivity by detecting the interaction of the specific chemical substance with the sensor material through selective binding, adsorption and permeation of analyte. This research focuses on development...
Show moreThe role of sensor technology is obvious in improvement and optimization of many industrial processes. The sensor films, which are considered the core of chemical sensors, have the capability to detect the presence and concentration of a specific chemical substance. Such sensor films achieve selectivity by detecting the interaction of the specific chemical substance with the sensor material through selective binding, adsorption and permeation of analyte. This research focuses on development and verification of a comprehensive mathematical model of mixed metal oxide thin film growth using spray pyrolysis technique (SPT). An experimental setup is used to synthesize mixed metal oxide films on a heated substrate. The films are analyzed using a variety of characterization tools. The results are used to validate the mathematical model. There are three main stages to achieve this goal: 1) A Lagrangian-Eulerian method is applied to develop a CFD model of atomizing multi-component solution. The model predicts droplet characteristics in flight, such as spatial distribution of droplet size and concentration. 2) Upon reaching the droplets on the substrate, a mathematical model of multi-phase transport and chemical reaction phenomena in a single droplet is developed and used to predict the deposition of thin film. The various stages of droplet morphology associated with surface energy and evaporation are predicted. 3) The processed films are characterized for morphology and chemical composition (SEM, XPS) and the data are used to validate the models as well as investigate the influence of process parameters on the structural characteristics of mixed metal oxide films. The structural characteristics are investigated of nano structured thin films comprising of ZnO, SnO2, ZnO+In2O3 and SnO2+In2O3 composites. The model adequately predicts the size distribution and film thickness when the nanocrystals are well-structured at the controlled temperature and concentration.
Show less - Date Issued
- 2014
- Identifier
- CFE0005817, ucf:50048
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0005817
