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(1 - 4 of 4)
- Title
- INVESTIGATIONS ON RF SPUTTER DEPOSITED SICN THIN FILMS FOR MEMS APPLICATIONS.
- Creator
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Todi, Ravi, Coffey, Kevin, University of Central Florida
- Abstract / Description
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With the rapid increase in miniaturization of mechanical components, the need for a hard, protective coatings is of great importance. In this study we investigate some of the mechanical, chemical and physical properties of the SiCN thin films. Thin films of amorphous silicon carbide nitride (a-SiCxNy) were deposited in a RF magnetron sputtering system using a powder pressed SiC target. Films with various compositions were deposited on to silicon substrate by changing the N2/Ar gas ratios...
Show moreWith the rapid increase in miniaturization of mechanical components, the need for a hard, protective coatings is of great importance. In this study we investigate some of the mechanical, chemical and physical properties of the SiCN thin films. Thin films of amorphous silicon carbide nitride (a-SiCxNy) were deposited in a RF magnetron sputtering system using a powder pressed SiC target. Films with various compositions were deposited on to silicon substrate by changing the N2/Ar gas ratios during sputtering. Nano-indentation studies were performed to investigate the mechanical properties such as hardness and reduced modulus of the SiCN films. Surface morphology of the films was characterized by using atomic force microscopy (AFM). X-ray photoelectron spectroscopy (XPS) data indicated that the chemical status is highly sensitive to the nitrogen ratios during sputtering. Further, the films were annealed in dry oxygen ambient in the temperature range of 400 – 900°C and characterized using XPS to investigate the chemical composition and oxidation kinetics at each annealing temperature. The surface roughness of these films was studied as a function of annealing temperature and film composition with the help of a "Veeco" optical profilometer. Nano-indentation studies indicated that the hardness and the reduced modulus of the film are sensitive to the N2/Ar ratio of gas flow during sputtering. AFM studies revealed that the films become smoother as the N2/Ar ratio is increased. XPS data indicated the existence of C-N phases in the as-deposited films. The study of oxidation kinetics of RF sputter deposited SiCN thin films, using XPS, suggest that N2 co-sputtering helps to suppress the formation of a surface oxide, by allowing un-bonded Si to bond with N and C inside the vacuum chamber as opposed to bonding with O in atmosphere.
Show less - Date Issued
- 2005
- Identifier
- CFE0000839, ucf:46669
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0000839
- Title
- ELECTRONIC PROPERTIES AND MICROSTRUCTURES OF AMORPHOUS SICN CERAMICS DERIVED FROM POLYMER PRECURSORS.
- Creator
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JIANG, TAO, An, Linan, University of Central Florida
- Abstract / Description
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Polymer-derived ceramics (PDCs) are a new class of high-temperature materials synthesized by thermal decomposition of polymeric precursors. These materials possess many unique features as compared with conventional ceramics synthesized by powder metallurgy based processing. For example, PDCs are neither amorphous nor crystalline. Instead, they possess nano-domain structures. Due to the direct chemical-to-ceramic processing, PDCs can be used for making components and devices with complex...
Show morePolymer-derived ceramics (PDCs) are a new class of high-temperature materials synthesized by thermal decomposition of polymeric precursors. These materials possess many unique features as compared with conventional ceramics synthesized by powder metallurgy based processing. For example, PDCs are neither amorphous nor crystalline. Instead, they possess nano-domain structures. Due to the direct chemical-to-ceramic processing, PDCs can be used for making components and devices with complex shapes. Thus, understanding the properties and structures of these materials are of both fundamental and practical interest. In this work, the structures and electronic behavior of polymer-derived amorphous silicon carbonitrides (SiCNs) were investigated. The materials were synthesized by pyrolysis of a commercially available liquid precursor. Ceramic materials with varied structures/properties were successfully synthesized by modifying the precursor and using different pyrolysis temperatures. The structures of the obtained materials were studied using XRD, solid state NMR, EPR, FTIR and Raman Spectroscope. The electronic behavior of the materials was investigated by measuring I-V curves, Hall effects, temperature dependent conductivity. The experiments were also performed to measure UV-Visible absorption and dielectric properties of the materials. This work leads to the following significant progresses: (i) developed quantitative technique for measuring free carbon concentration; (ii) achieved better understanding of the electronic conduction mechanisms and measured electronic structures of the materials for the first time; and (iii) demonstrated that these materials possess unusual dielectric behavior and provide qualitative explanations.
Show less - Date Issued
- 2009
- Identifier
- CFE0002702, ucf:48174
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0002702
- Title
- NOVEL CONCEPTUAL DESIGN AND ANLYSIS OF POLYMER DERIVED CERAMIC MEMS SENSORS FOR GAS TURBINE ENVIRONMENT.
- Creator
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Nagaiah, Narasimha, Kapat, Jay, University of Central Florida
- Abstract / Description
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Technical challenges for developing micro sensors for Ultra High Temperature and turbine applications lie in that the sensors have to survive extremely harsh working conditions that exist when converting fuel to energy. These conditions include high temperatures (500-1500°C), elevated pressures (200-400 psi), pressure oscillations, corrosive environments (oxidizing conditions, gaseous alkali, and water vapors), surface coating or fouling, and high particulate loading. Several technologies are...
Show moreTechnical challenges for developing micro sensors for Ultra High Temperature and turbine applications lie in that the sensors have to survive extremely harsh working conditions that exist when converting fuel to energy. These conditions include high temperatures (500-1500°C), elevated pressures (200-400 psi), pressure oscillations, corrosive environments (oxidizing conditions, gaseous alkali, and water vapors), surface coating or fouling, and high particulate loading. Several technologies are currently underdeveloped for measuring these parameters in turbine engines. One of them is an optical-based non-contact technology. However, these nondirective measuring technologies lack the necessary accuracy, at least at present state. An alternative way to measure these parameters without disturbing the working environments is using MEMS type sensors. Currently, the techniques under development for such harsh environment applications are silicon carbide (SiC) and silicon nitrite (Si3N4) –based ceramic MEMS sensors. But those technologies present some limitation such as narrow processing method, high cost (materials and processing cost), and limited using temperatures (typically < 800 C). In this research we propose to develop two sensors based on recently developed polymer-derived ceramics (PDCs): Constant Temperature Hot wire Anemometer, temperature/heat-flux sensor for turbine applications. PDC is a new class of high temperature ceramics. As we shall describe below, many unique features of PDCs make them particularly suitable for the proposed sensors, including: excellent thermo-mechanical properties at high temperatures, enable high temperature operation of the devices; various well-developed processing technologies, such as injection molding,photolithography, embossing, DRIE etching and precise machining, can be used for the fabrication of the devices; and tunable electric conductivity, enable the proposed sensors fabricated from similar materials, thus reliability considerations associated with thermal mismatch, which is a big concern when using MEMS-based sensors at elevated temperatures, will be minimized.
Show less - Date Issued
- 2006
- Identifier
- CFE0001285, ucf:46892
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0001285
- Title
- 1, 2, and 3 Dimension Carbon/Silicon Carbon Nitride Ceramic Composites.
- Creator
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Calderon Flores, Jean, Zhai, Lei, Campiglia, Andres, Yestrebsky, Cherie, Zou, Shengli, Khondaker, Saiful, University of Central Florida
- Abstract / Description
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Polymer-derived ceramics (PDCs) are exceptional ultra-high temperature and stable multifunctional class of materials that can be synthesized from a polymer precursor through thermal decomposition. The presented research focuses on 1-D nanofibers, 2-D films and 3-D bulk, carbon-rich silicon carbon nitride (SiCN) ceramics. 1-D nanofibers were prepared via electrospinning for light weight, flame retardant and conductive applications. The commercially available CerasetTM VL20, a liquid...
Show morePolymer-derived ceramics (PDCs) are exceptional ultra-high temperature and stable multifunctional class of materials that can be synthesized from a polymer precursor through thermal decomposition. The presented research focuses on 1-D nanofibers, 2-D films and 3-D bulk, carbon-rich silicon carbon nitride (SiCN) ceramics. 1-D nanofibers were prepared via electrospinning for light weight, flame retardant and conductive applications. The commercially available CerasetTM VL20, a liquid cyclosilazane pre-ceramic precursor, was mixed with polyacrylonitrile (PAN) in order to make the cyclosilazane electrospinnable. Carbon-rich PDC nano?bers were fabricated by electrospinning various ratios of PAN/cyclosilazane solutions followed by pyrolysis. Surface morphology of the electro spun nanofibers characterized by SEM show PDC nano?bers with diameters ranging from 100-300 nm. Also, thermal stability towards oxidation showed a 10% mass loss at 623oC. 2-D carbon/SiCN films were produced by drop-casting a mixture of PAN/cyclosilazane onto a glass slide followed by pyrolysis of the film. Samples ranging from 10:1 to 1:10 PAN:cyclosilazane were made by dissolving the solutes into DMF to produce solutions ranging from 1% to 12% by weight. Green, heat-stabilized, and pyrolyzed 8% films were examined with FTIR to monitor the change in chemical structure at each step of the ceramization. SEM shows that high PAN samples produced films with ceramic embedded spheroid components in a carbon matrix, while high cyclosilazane samples produced carbon embedded spheroid.Finally, this research focuses on the challenge of making fully dense, 3-D bulk PDCs materials. Here we present a composite of SiCN with reduced graphene oxide (rGO) aerogels as a route for fully dense bulk PDCs. Incorporation of the rGO aerogel matrix into the SiCN has its pros and cons. While it lowers the strength of the composite, it allows for fabrication of large bulk samples and an increase in the electrical conductivity of the PDC. The morphology, mechanical, electrical properties and thermal conductivity of graphene-SiCN composite with varying rGO aerogel loading (0.3-2.4%) is presented. The high temperature stability, high electrical conductivity and low thermal conductivity of these composites make them excellent candidates for thermoelectric applications. Generally, carbon-rich SiCN composites with improved thermal and electrical properties are of great importance to the aerospace and electronics industries due to their expected harsh operating environments.
Show less - Date Issued
- 2015
- Identifier
- CFE0005768, ucf:50095
- Format
- Document (PDF)
- PURL
- http://purl.flvc.org/ucf/fd/CFE0005768
